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1. WO2020001750 - DISTANCE SENSOR FOR MEASURING A DISTANCE TO A FERROMAGNETIC ELEMENT, MAGNETICAL LEVITATION SYSTEM AND METHOD FOR MEASURING A DISTANCE TO A FERROMAGNETIC ELEMENT

Publication Number WO/2020/001750
Publication Date 02.01.2020
International Application No. PCT/EP2018/067109
International Filing Date 26.06.2018
IPC
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
7
Measuring arrangements characterised by the use of electric or magnetic means
G PHYSICS
01
MEASURING; TESTING
D
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; TRANSFERRING OR TRANSDUCING ARRANGEMENTS NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
5
Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
12
using electric or magnetic means
14
influencing the magnitude of a current or voltage
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
54
Non-mechanical conveyers not otherwise provided for
02
electrostatic, electric, or magnetic
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
G01B 7/00 (2006.01)
G01D 5/14 (2006.01)
B65G 54/02 (2006.01)
C23C 14/00 (2006.01)
CPC
B65G 54/02
C23C 14/00
G01B 7/003
G01D 5/147
Applicants
  • APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Ave. Santa Clara, California 95054, US
  • EHMANN, Christian Wolfgang [DE/DE]; DE (US)
Inventors
  • EHMANN, Christian Wolfgang; DE
Agents
  • ZIMMERMANN & PARTNER PATENTANWÄLTE MBB; Josephspitalstr. 15 80331 München, DE
Priority Data
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) DISTANCE SENSOR FOR MEASURING A DISTANCE TO A FERROMAGNETIC ELEMENT, MAGNETICAL LEVITATION SYSTEM AND METHOD FOR MEASURING A DISTANCE TO A FERROMAGNETIC ELEMENT
(FR) CAPTEUR DE DISTANCE PERMETTANT DE MESURER UNE DISTANCE PAR RAPPORT À UN ÉLÉMENT FERROMAGNÉTIQUE, SYSTÈME DE LÉVITATION MAGNÉTIQUE ET PROCÉDÉ PERMETTANT DE MESURER UNE DISTANCE PAR RAPPORT À UN ÉLÉMENT FERROMAGNÉTIQUE
Abstract
(EN)
The present disclosure relates to a distance sensor for measuring a distance to a ferromagnetic element, a magnetic levitation system for magnetically levitating a ferromagnetic element and a method for compensating stray magnetic fields in a distance sensor. According to a first aspect, a distance sensor for measuring a distance to a ferromagnetic element is provided. According to a second aspect, a magnetic levitation system for magnetically levitating a ferromagnetic element is provided, comprising at least one electromagnetic actuator and at least one distance sensor according to the first aspect, wherein the at least one distance sensor is configured to measure a distance to the ferromagnetic element. According to a third aspect, a method for measuring a distance to a ferromagnetic element is provided, the method comprising providing a distance sensor comprising a first hall element and a second hall element, detecting a first signal of the first hall element and a second signal of the second hall element, and subtracting the second signal from the first signal. According to a fourth embodiment, a use of a distance sensor according to the first aspect is provided, wherein the distance sensor is used in a magnetic levitation apparatus, wherein the distance sensor is configured to measure a distance to a levitated body.
(FR)
La présente invention concerne un capteur de distance permettant de mesurer une distance par rapport à un élément ferromagnétique, un système de lévitation magnétique pour lévitation magnétique d'un élément ferromagnétique et un procédé permettant de compenser des champs magnétiques parasites dans un capteur de distance. Selon un premier aspect, l'invention concerne un capteur de distance permettant de mesurer une distance par rapport à un élément ferromagnétique. Selon un second aspect, l'invention concerne un système de lévitation magnétique pour lévitation magnétique d'un élément ferromagnétique, comprenant au moins un actionneur électromagnétique et au moins un capteur de distance selon le premier aspect, le ou les capteurs de distance étant configurés afin de mesurer une distance par rapport à l'élément ferromagnétique. Selon un troisième aspect, l'invention concerne un procédé de mesure d'une distance par rapport à un élément ferromagnétique, le procédé comprenant les étapes consistant à fournir un capteur de distance comprenant un premier élément à effet hall et un second élément à effet hall, à détecter un premier signal du premier élément à effet hall et un second signal du second élément à effet hall, et à soustraire le second signal du premier signal. Selon un quatrième mode de réalisation, l'invention concerne l'utilisation d'un capteur de distance selon le premier aspect, le capteur de distance étant utilisé dans un appareil de lévitation magnétique, le capteur de distance étant configuré afin de mesurer une distance par rapport à un corps en lévitation.
Also published as
KR1020197027160
KRKR1020197027160
Latest bibliographic data on file with the International Bureau