Processing

Please wait...

Settings

Settings

1. WO2020001676 - METHOD AND DEVICE FOR COATING A COMPONENT BY MEANS OF PHYSICAL VAPOUR DEPOSITION

Publication Number WO/2020/001676
Publication Date 02.01.2020
International Application No. PCT/DE2019/100417
International Filing Date 09.05.2019
IPC
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
02
Pretreatment of the material to be coated
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
56
Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C23C 14/02 (2006.01)
C23C 14/34 (2006.01)
C23C 14/56 (2006.01)
CPC
C23C 14/022
C23C 14/34
C23C 14/56
Applicants
  • SCHAEFFLER TECHNOLOGIES AG & CO. KG [DE/DE]; Industriestraße 1-3 91074 Herzogenaurach, DE
Inventors
  • NAZAROVS, Pāvels; LV
  • MITIN, Valery; RU
  • KOVALENKO, Vladimirs; LV
Priority Data
10 2018 115 404.627.06.2018DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) VERFAHREN UND VORRICHTUNG ZUR BESCHICHTUNG EINES BAUTEILS MITTELS PHYSIKALISCHER GASPHASENABSCHEIDUNG
(EN) METHOD AND DEVICE FOR COATING A COMPONENT BY MEANS OF PHYSICAL VAPOUR DEPOSITION
(FR) PROCÉDÉ ET DISPOSITIF DE REVÊTEMENT D’UN MODULE PAR DÉPÔT PHYSIQUE EN PHASE VAPEUR
Abstract
(DE)
Die Erfindung betrifft ein Verfahren zur Beschichtung eines Bauteils (7) mittels physikalischer Gasphasenabscheidung, wobei in einem Reinigungsschritt durch einen lonenstrahl Verunreinigungen von einer Oberfläche des Bauteils (7) entfernt werden und in einem Beschichtungsschritt durch Kathodenzerstäubung eine Beschichtung auf der Oberfläche des Bauteils (7) abgeschieden wird, wobei der Reinigungsschritt und der Beschichtungsschritt in derselben Gasatmosphäre und unter demselben Druck durchgeführt werden. Ein weiterer Gegenstand der Erfindung ist eine Vorrichtung (10) zur Beschichtung eines Bauteils (7) mittels physikalischer Gasphasenabscheidung.
(EN)
The invention relates to a method for coating a component (7) by means of physical vapour deposition, wherein in a cleaning step contaminants are removed from the surface of the component (7) by an ion beam and in a coating step a coating is deposited on the surface of the component (7) by cathode sputtering, wherein the cleaning step and the coating step are carried out in the same gas atmosphere and under the same pressure. The invention also concerns a device (10) for coating a component (7) by means of physical vapour deposition.
(FR)
L’invention concerne un procédé de revêtement d’un module (7) par dépôt physique en phase vapeur, des impuretés étant éliminées d’une surface du module (7) par un rayon ionique lors d’une étape de nettoyage et un revêtement étant déposé sur la surface du module (7) par pulvérisation cathodique lors d’une étape de revêtement, l’étape de nettoyage et l’étape de revêtement étant mises en œuvre dans la même atmosphère gazeuse et à la même pression. Un autre objet de l’invention est un dispositif (10) de revêtement d’un module (7) par dépôt physique en phase vapeur.
Latest bibliographic data on file with the International Bureau