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1. WO2020000629 - ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY PANEL

Publication Number WO/2020/000629
Publication Date 02.01.2020
International Application No. PCT/CN2018/103269
International Filing Date 30.08.2018
IPC
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
02
including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
12
the substrate being other than a semiconductor body, e.g. an insulating body
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
28
including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
32
with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
13
based on liquid crystals, e.g. single liquid crystal display cells
133
Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
136
Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
1362
Active matrix addressed cells
1368
in which the switching element is a three-electrode device
H01L 27/12 (2006.01)
H01L 27/32 (2006.01)
G02F 1/1368 (2006.01)
CPC
G02F 1/1368
H01L 27/1214
H01L 27/1225
H01L 27/3244
Applicants
  • 深圳市华星光电半导体显示技术有限公司 SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. [CN/CN]; 中国广东省深圳市 光明新区公明街道塘明大道9-2号 No.9-2, Tangming Road, Gongming Street, Guangming New District Shenzhen, Guangdong 518132, CN
Inventors
  • 夏慧 XIA, Hui; CN
  • 谭志威 TAN, Zhiwei; CN
Agents
  • 深圳翼盛智成知识产权事务所(普通合伙) ESSEN PATENT & TRADEMARK AGENCY; 中国广东省深圳市 福田区深南大道6021号喜年中心A座1709-1711 Room 1709-1711, Block A,Hailrun Complex, No.6021 Shennan Blvd, Futian District Shenzhen, Guangdong 518040, CN
Priority Data
201810677642.327.06.2018CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, AND DISPLAY PANEL
(FR) SUBSTRAT MATRICIEL ET SON PROCÉDÉ DE FABRICATION AINSI QUE PANNEAU D'AFFICHAGE
(ZH) 阵列基板及其制作方法、显示面板
Abstract
(EN)
Provided in the present application are an array substrate and a manufacturing method therefor, and a display panel. The present application forms a gate electrode and a source/drain electrode with different thicknesses on an electroplated base layer by means of a metal plating process, and forms a dielectric layer on the substrate covering the gate electrode and exposing the source/drain electrode by utilizing the height difference between the gate electrode and the source/drain electrode, such that an active layer is electrically connected to the source/drain electrode and isolated from the gate electrode by means of the dielectric layer, thus not requiring an etching stop layer, simplifying the IGZO process and saving costs.
(FR)
La présente invention concerne un substrat matriciel et son procédé de fabrication ainsi qu'un panneau d'affichage. La présente invention permet de former une électrode grille et une électrode source/drain d'épaisseurs différentes sur une couche de base protégée par électrodéposition au moyen d'un procédé de placage métallique, et de former une couche diélectrique sur le substrat recouvrant l'électrode grille et exposant l'électrode source/drain au moyen de la différence de hauteur entre l'électrode grille et l'électrode source/drain, de sorte qu'une couche active soit électriquement connectée à l'électrode source/drain et isolée de l'électrode grille au moyen de la couche diélectrique, ne nécessitant ainsi pas de couche d'arrêt de gravure, ce qui simplifie le traitement IGZO et économise les coûts.
(ZH)
本申请提出了一种阵列基板及其制作方法、显示面板,本申请通过金属电镀的工艺在电镀基层上形成不同厚度的栅极和源漏极,并利用栅极和源漏极的高度差,在基板上形成将栅极覆盖以及露出源漏极的介电层,使得有源层与源漏极连接导通,并通过介电层与栅极隔离,去掉了蚀刻阻挡层,简化了IGZO的制程工艺,节省了成本。
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