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1. WO2019217012 - HYDROPHILIC AND ZETA POTENTIAL TUNABLE CHEMICAL MECHANICAL POLISHING PADS

Publication Number WO/2019/217012
Publication Date 14.11.2019
International Application No. PCT/US2019/025879
International Filing Date 04.04.2019
IPC
B24B 37/22 2012.1
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
22characterised by a multi-layered structure
B24B 37/24 2012.1
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
24characterised by the composition or properties of the pad materials
B29C 64/112 2017.1
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
64Additive manufacturing, i.e. manufacturing of three-dimensional objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
10Processes of additive manufacturing
106using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
112using individual droplets, e.g. from jetting heads
B33Y 10/00 2015.1
BPERFORMING OPERATIONS; TRANSPORTING
33ADDITIVE MANUFACTURING TECHNOLOGY
YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
10Processes of additive manufacturing
B33Y 70/00 2015.1
BPERFORMING OPERATIONS; TRANSPORTING
33ADDITIVE MANUFACTURING TECHNOLOGY
YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
70Materials specially adapted for additive manufacturing
CPC
B22F 10/10
BPERFORMING OPERATIONS; TRANSPORTING
22CASTING; POWDER METALLURGY
FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER
10Additive manufacturing of workpieces or articles from metallic powder
10Formation of a green body
B22F 2999/00
BPERFORMING OPERATIONS; TRANSPORTING
22CASTING; POWDER METALLURGY
FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER
2999Aspects linked to processes or compositions used in powder metallurgy
B24B 37/22
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
22characterised by a multi-layered structure
B24B 37/24
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
24characterised by the composition or properties of the pad materials
B24B 37/26
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
26characterised by the shape of the lapping pad surface, e.g. grooved
B29C 64/112
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
64Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
10Processes of additive manufacturing
106using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
112using individual droplets, e.g. from jetting heads
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • GANAPATHIAPPAN, Sivapackia
  • FU, Boyi
  • CHOCKALINGAM, Ashwin
  • VORA, Ankit
  • REDFIELD, Daniel
  • BAJAJ, Rajeev
  • PATIBANDLA, Nag B.
  • NG, Hou T.
  • MADHUSOODHANAN, Sudhakar
Agents
  • PATTERSON, B. Todd
  • STEVENS, Joseph J.
Priority Data
62/668,24407.05.2018US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) HYDROPHILIC AND ZETA POTENTIAL TUNABLE CHEMICAL MECHANICAL POLISHING PADS
(FR) TAMPONS DE POLISSAGE CHIMICO-MÉCANIQUE ACCORDABLE À POTENTIEL ZÊTA ET HYDROPHILE
Abstract
(EN) In one implementation, a method of forming a porous polishing pad is provided. The method comprises depositing a plurality of composite layers with a 3D printer to reach a target thickness. Depositing the plurality of composite layers comprises dispensing one or more droplets of a curable resin precursor composition onto a support. Depositing the plurality of composite layers further comprises dispensing one or more droplets of a porosity-forming composition onto the support, wherein at least one component of the porosity-forming composition is removable to form the pores in the porous polishing pad.
(FR) Selon un mode de réalisation, l'invention concerne un procédé de formation d’un tampon de polissage poreux. Le procédé comprend le dépôt d'une pluralité de couches composites au moyen d'une imprimante 3D en vue d'atteindre une épaisseur cible. Le dépôt de la pluralité de couches composites comprend la distribution d'une ou de plusieurs gouttelettes d'une composition de précurseur de résine durcissable sur un support. Le dépôt de la pluralité de couches composites comprend en outre la distribution d'une ou de plusieurs gouttelettes d'une composition de formation de porosité sur le support, au moins un constituant de la composition de formation de porosité pouvant être éliminé en vue de former les pores dans le tampon de polissage poreux.
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