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1. WO2019190660 - FOIL SHEET ASSEMBLIES FOR ION IMPLANTATION

Publication Number WO/2019/190660
Publication Date 03.10.2019
International Application No. PCT/US2019/018883
International Filing Date 21.02.2019
IPC
H01J 37/09 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
09Diaphragms; Shields associated with electron- or ion-optical arrangements; Compensation of disturbing fields
H01J 37/317 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
317for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
CPC
C23C 14/48
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
48Ion implantation
H01J 2237/0203
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
02Details
0203Protection arrangements
H01J 27/022
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
27Ion beam tubes
02Ion sources; Ion guns
022Details
H01J 27/026
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
27Ion beam tubes
02Ion sources; Ion guns
026Cluster ion sources
H01J 27/205
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
27Ion beam tubes
02Ion sources; Ion guns
20using particle ; beam; bombardment, e.g. ionisers
205with electrons, e.g. electron impact ionisation, electron attachment
H01J 37/08
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
08Ion sources; Ion guns
Applicants
  • VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. [US]/[US]
Inventors
  • CHANEY, Craig R.
  • MCLAUGHLIN, Adam M.
  • SARGENT, James A.
  • ABESHAUS, Joshua M.
Agents
  • FRAME, Robert C.
  • NIELDS, LEMACK & FRAME, LLC
  • LEMACK, Kevin S.
Priority Data
15/941,16330.03.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) FOIL SHEET ASSEMBLIES FOR ION IMPLANTATION
(FR) ENSEMBLES FEUILLE POUR IMPLANTATION IONIQUE
Abstract
(EN)
A foil liner comprising a plurality of foil layers is disclosed. The foil layers may each be an electrically conductive material that are stacked on top of each other. The spacing between adjacent foil layers may create a thermal gradient such that the temperature of the plasma is hotter than the temperature of the ion source chamber. In other embodiments, the foil layers may be assembly to sink the heat from the plasma so that the plasma is cooler than the temperature of the ion source chamber. In some embodiments, gaps or protrusions are disposed on one or more of the foil layers to affect the thermal gradient. In certain embodiments, one or more of the foil layers may be constructed of an insulating material to further affect the thermal gradient. The foil liner may be easily assembled, installed and replaced from within the ion source chamber.
(FR)
L'invention concerne un revêtement en feuille comprenant une pluralité de couches de feuille. Les couches de feuille peuvent être chacune un matériau électroconducteur et sont empilées les unes sur les autres. L'espacement entre les couches de feuille adjacentes peut créer un gradient thermique de telle sorte que la température du plasma est plus chaude que la température de la chambre de source d'ions. Selon d'autres modes de réalisation, les couches de feuille peuvent être assemblées pour dissiper la chaleur provenant du plasma de telle sorte que le plasma est plus froid que la température de la chambre de source d'ions. Selon certains modes de réalisation, des espaces ou des saillies sont disposés sur une ou plusieurs des couches de feuille pour affecter le gradient thermique. Selon certains modes de réalisation, une ou plusieurs des couches de feuille peuvent être constituées d'un matériau isolant afin d'affecter davantage le gradient thermique. Le revêtement en feuille peut être facilement assemblé, installé et remplacé à partir de l'intérieur de la chambre de source d'ions.
Also published as
JP2021502694
Latest bibliographic data on file with the International Bureau