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1. WO2019187976 - FINE PARTICLE ANALYSIS DEVICE, FINE PARTICLE ANALYSIS SYSTEM, AND CLEANING METHOD

Publication Number WO/2019/187976
Publication Date 03.10.2019
International Application No. PCT/JP2019/008072
International Filing Date 01.03.2019
IPC
G01N 1/00 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1Sampling; Preparing specimens for investigation
B01D 45/12 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
45Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
12by centrifugal forces
B04C 5/14 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
14Construction of the underflow ducting; Apex constructions; Discharge arrangements
B04C 5/20 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
20with heating or cooling, e.g. quenching, means
B04C 5/22 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
22with cleaning means
B04C 9/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
9Combinations with other devices, e.g. fans
CPC
B01D 45/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
45Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
12by centrifugal forces
B04C 5/14
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
14Construction of the underflow ducting; Apex constructions; Discharge arrangements ; ; discharge through sidewall provided with a few slits or perforations
B04C 5/20
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
20with heating or cooling, e.g. quenching, means
B04C 5/22
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
22with cleaning means
B04C 9/00
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
9Combinations with other devices, e.g. fans, ; expansion chambers, diffusors, water locks
G01N 1/00
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1Sampling; Preparing specimens for investigation
Applicants
  • 株式会社日立製作所 HITACHI, LTD. [JP]/[JP]
Inventors
  • 熊野 峻 KUMANO Shun
  • 永野 久志 NAGANO Hisashi
  • 伊藤 孝広 ITOU Takahiro
  • 水野 弘基 MIZUNO Hiroki
  • 野尻 辰夫 NOJIRI Tatsuo
  • 杉山 益之 SUGIYAMA Masuyuki
Agents
  • 特許業務法人磯野国際特許商標事務所 ISONO INTERNATIONAL PATENT OFFICE, P.C.
Priority Data
2018-06808330.03.2018JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) FINE PARTICLE ANALYSIS DEVICE, FINE PARTICLE ANALYSIS SYSTEM, AND CLEANING METHOD
(FR) DISPOSITIF D'ANALYSE DE PARTICULES FINES, SYSTÈME D'ANALYSE DE PARTICULES FINES ET PROCÉDÉ DE NETTOYAGE
(JA) 微粒子分析装置、微粒子分析システム及び洗浄方法
Abstract
(EN)
Provided is a fine particle analysis device, and to clean the inside thereof without stopping or disassembling the fine particle analysis device, the following are provided: a cyclone dust collection device (14); a primary filter (16) that is connected downstream of the cyclone dust collection device (14) and that is heated; a gas analysis device (31) that is connected to the primary filter (16); a gas piping section that connects the cyclone dust collection device (14) and the gas analysis device (31), and that has disposed therein the primary filter (16); and a cleaning gas introduction device (21) that introduces a cleaning gas downstream of the primary filter (16) in the gas piping section and/or to the cyclone dust collection device (14). The present invention is characterized in that during a cleaning mode in which at least the primary filter (16) is cleaned, the flow rate of the cleaning gas that is introduced from the cleaning gas introduction device (21) increases so as to be greater than the flow rate during an analysis mode in which fine particles are analyzed by the gas analysis device (31).
(FR)
L'invention concerne un dispositif d'analyse de particules fines, et pour nettoyer l'intérieur de celui-ci sans arrêter ou démonter le dispositif d'analyse de particules fines, ce qui suit est fourni : un dispositif de collecte de poussière à cyclone (14) ; un filtre primaire (16) qui est raccordé en aval du dispositif de collecte de poussière à cyclone (14) et qui est chauffé ; un dispositif d'analyse de gaz (31) qui est raccordé au filtre primaire (16) ; une section de tuyauterie de gaz qui raccorde le dispositif de collecte de poussière à cyclone (14) et le dispositif d'analyse de gaz (31), et qui possède, disposé dans celui-ci, le filtre primaire (16) ; et un dispositif d'introduction de gaz de nettoyage (21) qui introduit un gaz de nettoyage en aval du filtre primaire (16) dans la section de tuyauterie de gaz et/ou vers le dispositif de collecte de poussière à cyclone (14). La présente invention est caractérisée en ce que, au cours d'un mode de nettoyage dans lequel au moins le filtre primaire (16) est nettoyé, le débit du gaz de nettoyage qui est introduit à partir du dispositif d'introduction de gaz de nettoyage (21) augmente de manière à être supérieur au débit au cours d'un mode d'analyse dans lequel des particules fines sont analysées par le dispositif d'analyse de gaz (31).
(JA)
微粒子分析装置を停止・分解することなく微粒子分析装置の内部を洗浄するため、サイクロン集塵装置(14)と、サイクロン集塵装置(14)の下流に接続され、加熱される1次フィルタ(16)と、1次フィルタ(16)と接続されているガス分析装置(31)と、サイクロン集塵装置(14)と、ガス分析装置(31)とを接続し、1次フィルタ(16)が設置されるガス配管部と、ガス配管部における1次フィルタ(16)の下流及びサイクロン集塵装置(14)の少なくとも一方に、洗浄ガスを導入する洗浄ガス導入装置(21)と、を有し、少なくとも1次フィルタ(16)を洗浄する洗浄モード時において、ガス分析装置(31)による微粒子の分析が行われる分析モード時よりも洗浄ガス導入装置(21)から導入される洗浄ガスの流量が上昇することを特徴とする。
Also published as
Latest bibliographic data on file with the International Bureau