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1. (WO2019067833) COMPOSITIONS AND METHODS FOR PREVENTING COLLAPSE OF HIGH ASPECT RATIO STRUCTURES DURING DRYING
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Pub. No.: WO/2019/067833 International Application No.: PCT/US2018/053299
Publication Date: 04.04.2019 International Filing Date: 28.09.2018
IPC:
C11D 7/50 (2006.01) ,C11D 11/00 (2006.01) ,C11D 7/32 (2006.01)
C CHEMISTRY; METALLURGY
11
ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
D
DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
7
Compositions of detergents based essentially on non-surface-active compounds
50
Solvents
C CHEMISTRY; METALLURGY
11
ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
D
DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
11
Special methods for preparing compositions containing mixtures of detergents
C CHEMISTRY; METALLURGY
11
ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
D
DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
7
Compositions of detergents based essentially on non-surface-active compounds
22
Organic compounds
32
containing nitrogen
Applicants:
VERSUM MATERIALS US, LLC [US/US]; 8555 S. River Parkway Tempe, AZ 85284, US
Inventors:
GE, Jhih, Kuei; US
LEE, Yi-Chia; US
LIU, Wen, Dar; US
CHEN, Tianniu; US
Agent:
AQUILINA, James, J.; US
Priority Data:
16/141,73525.09.2018US
62/565,26629.09.2017US
Title (EN) COMPOSITIONS AND METHODS FOR PREVENTING COLLAPSE OF HIGH ASPECT RATIO STRUCTURES DURING DRYING
(FR) COMPOSITIONS ET PROCÉDÉS POUR EMPÊCHER L'AFFAISSEMENT DE STRUCTURES À RAPPORT HAUTEUR/LARGEUR ÉLEVÉ PENDANT LE SÉCHAGE
Abstract:
(EN) Described herein is an aqueous composition for treating a substrate including patterns having line-space dimensions of 50 nm or below to prevent collapse of the patters, the composition comprising: a solvent system comprising water and a water-miscible organic solvent; a surface modifier that is a reaction product between an alkylamine and an organic acid; and an optional pH adjusting agent.
(FR) L'invention concerne une composition aqueuse pour traiter un substrat comprenant des motifs ayant des dimensions de ligne-espace de 50 nm ou moins pour empêcher l'affaissement des motifs, la composition comprenant: un système de solvant comprenant de l'eau et un solvant organique miscible à l'eau, un modificateur de surface qui est un produit de réaction entre une alkylamine et un acide organique et un agent d'ajustement du pH facultatif.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)