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1. (WO2019067488) GRAPHENE MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT GAS SENSOR
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Pub. No.: WO/2019/067488 International Application No.: PCT/US2018/052773
Publication Date: 04.04.2019 International Filing Date: 26.09.2018
IPC:
G01N 29/036 (2006.01) ,H03H 9/24 (2006.01) ,C01B 32/182 (2017.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29
Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
02
Analysing fluids
036
by measuring frequency or resonance of acoustic waves
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
24
Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive
[IPC code unknown for C01B 32/182]
Applicants:
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM [US/US]; 210 West 7th Street Austin, Texas 78701, US
Inventors:
CULLINAN, Michael; US
CHO, Joon-Hyung; US
CAYLL, David; US
LADNER, Ian; US
Agent:
RUDICH, Rebecca G.; US
HALL, Miles E.; US
Priority Data:
62/563,38926.09.2017US
Title (EN) GRAPHENE MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT GAS SENSOR
(FR) CAPTEUR DE GAZ RÉSONANT À SYSTÈME MICRO-ÉLECTROMÉCANIQUE (MEMS) AU GRAPHÈNE
Abstract:
(EN) A method of manufacturing a nanoelectromechanical resonator allows for uniform tuning of a resonant frequency. The nanoelectromechanical resonator can be mass produced and used to sense the presence of a selected gas.
(FR) L'invention concerne un procédé de fabrication d'un résonateur nano-électromécanique permettant un accord uniforme d'une fréquence de résonance. Le résonateur nano-électromécanique peut être produit en masse et servir à détecter la présence d'un gaz sélectionné.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)