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1. (WO2019067118) IMPRINTING METHOD AND APPARATUS
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Pub. No.: WO/2019/067118 International Application No.: PCT/US2018/047723
Publication Date: 04.04.2019 International Filing Date: 23.08.2018
IPC:
B29C 43/58 (2006.01) ,B29C 59/02 (2006.01) ,B82Y 40/00 (2011.01)
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
43
Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
32
Component parts, details or accessories; Auxiliary operations
58
Measuring, controlling or regulating
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
59
Surface shaping, e.g. embossing; Apparatus therefor
02
by mechanical means, e.g. pressing
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
40
Manufacture or treatment of nano-structures
Applicants:
CANON KABUSHIKI KAISHA [JP/JP]; 30-2, Shimomaruko 3-Chome, Ohta-ku Tokyo, 146-8501, JP
CANON NANOTECHNOLOGIES, INC. [US/US]; 1807 West Braker Lane C-300 Austin, Texas 78758, US (AE)
Inventors:
PATEL, Mehul N.; US
FLETCHER, Edward Brian; US
BAMESBERGER, Seth J.; US
AGHILI, Alireza; US
Agent:
KING, Cameron A.; US
Priority Data:
62/565,36329.09.2017US
Title (EN) IMPRINTING METHOD AND APPARATUS
(FR) PROCÉDÉ ET APPAREIL D’IMPRESSION
Abstract:
(EN) A method, a system, and a controller for imprinting. Apply droplets of a formable material to imprint region of substrate. A partial pressure of formable material develops at a fluid-gas interface. A portion of an imprinting surface of a mesa on a template at an initial contact time is brought into contact with the droplets. The droplets merge and flow towards an imprint edge interface. A first gas flows in the imprint region prior to the initial contact time. A second gas flows into the imprint edge interface and region between the template and the substrate after the initial contact time. The template and the flow of the second gas reduces the partial pressure of the formable material below a vapor pressure of the formable material in a portion of the gap region adjacent to the fluid-gas interface at the imprint edge interface.
(FR) La présente invention concerne un procédé, un système et un dispositif de commande d'impression. Le procédé consiste à appliquer des gouttelettes d'un matériau formable sur une région d'impression d'un substrat. Une pression partielle de matériau formable se développe au niveau d'une interface fluide-gaz. Une partie d'une surface d'impression d'une mesa sur un gabarit à un temps de contact initial est amenée en contact avec les gouttelettes. Les gouttelettes fusionnent et s'écoulent vers une interface de bord d'impression. Un premier gaz s'écoule dans la région d'impression avant le temps de contact initial. Un second gaz s'écoule dans l'interface de bord d'impression et dans la région située entre le gabarit et le substrat après le temps de contact initial. Le gabarit et le flux du second gaz réduisent la pression partielle du matériau formable sous une pression de vapeur du matériau formable dans une partie de la région d'espace adjacente à l'interface fluide-gaz au niveau de l'interface de bord d'impression.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)