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1. (WO2019066916) COMPLEMENTARY GROUP III-NITRIDE TRANSISTORS WITH COMPLEMENTARY POLARIZATION JUNCTIONS
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Pub. No.: WO/2019/066916 International Application No.: PCT/US2017/054380
Publication Date: 04.04.2019 International Filing Date: 29.09.2017
IPC:
H01L 29/778 (2006.01) ,H01L 21/8238 (2006.01) ,H01L 29/66 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
68
controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified, or switched
76
Unipolar devices
772
Field-effect transistors
778
with two-dimensional charge carrier gas channel, e.g. HEMT
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
77
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
78
with subsequent division of the substrate into plural individual devices
82
to produce devices, e.g. integrated circuits, each consisting of a plurality of components
822
the substrate being a semiconductor, using silicon technology
8232
Field-effect technology
8234
MIS technology
8238
Complementary field-effect transistors, e.g. CMOS
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
Applicants:
INTEL CORPORATION [US/US]; 2200 Mission College Blvd. Santa Clara, CA 95054, US
Inventors:
THEN, Han Wui; US
DASGUPTA, Sansaptak; US
RADOSAVLJEVIC, Marko; US
Agent:
HOWARD, James M.; US
Priority Data:
Title (EN) COMPLEMENTARY GROUP III-NITRIDE TRANSISTORS WITH COMPLEMENTARY POLARIZATION JUNCTIONS
(FR) TRANSISTORS AU NITRURE DU GROUPE III DE TYPE COMPLÉMENTAIRE À JONCTIONS DE POLARISATION COMPLÉMENTAIRES
Abstract:
(EN) Group III-N transistors of complementary conductivity type employing two polarization junctions of complementary type. Each III-N polarization junction may include two III-N material layers having opposite crystal polarities. The opposing polarities may induce a two-dimensional charge sheet within each of the two III-N material layers. Opposing crystal polarities may be induced through introduction of an intervening layer between two III-N material layers. A III-N heterostructure may include two III-N polarization junctions. A 2D electron gas (2DEG) is induced at a first polarization junction and a 2D hole gas (2DHG) is induced at the second polarization junction. Transistors of complementary type may utilize a separate one of the polarization junctions, enabling III-N transistors to implement CMOS circuitry.
(FR) L'invention concerne des transistors du groupe III-N du type à conductivité complémentaire faisant appel à deux jonctions de polarisation de type complémentaire. Chaque jonction de polarisation au III-N peut comprendre deux couches de matériau de III-N ayant des polarités cristallines contraires. Les polarités contraires peuvent induire une feuille de charge bidimensionnelle à l'intérieur de chacune des deux couches de matériau de III-N. Des polarités cristallines contraires peuvent être induites par une introduction d'une couche intermédiaire entre deux couches de matériau de III-N. Une hétérostructure au III-N peut comprendre deux jonctions de polarisation au III-N. Un gaz d'électrons 2D (2DEG) est induit au niveau d'une première jonction de polarisation et un gaz de trou 2D (2DHG) est induit au niveau de la seconde jonction de polarisation. Des transistors de type complémentaire peuvent faire appel à une jonction séparée parmi les jonctions de polarisation, permettant aux transistors au III-N de constituer des circuits CMOS.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)