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1. (WO2019066431) MICROWAVE PLASMA GENERATOR IMPROVED IN POWER TRANSMISSION EFFICIENCY
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Pub. No.: WO/2019/066431 International Application No.: PCT/KR2018/011313
Publication Date: 04.04.2019 International Filing Date: 21.09.2018
IPC:
H01J 37/32 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
Applicants:
포항공과대학교 산학협력단 POSTECH ACADEMY-INDUSTRY FOUNDATION [KR/KR]; 경상북도 포항시 남구 청암로 77 77, Cheongam-ro, Nam-gu Pohang-si Gyeongsangbuk-do 37673, KR
Inventors:
심재윤 SIM, Jae Yoon; KR
권순구 KWON, Soon Ku; KR
Agent:
이철희 LEE, Cheol Hee; KR
Priority Data:
10-2017-012486527.09.2017KR
Title (EN) MICROWAVE PLASMA GENERATOR IMPROVED IN POWER TRANSMISSION EFFICIENCY
(FR) GÉNÉRATEUR DE PLASMA HYPERFRÉQUENCE AMÉLIORÉ EN TERMES D'EFFICACITÉ DE TRANSMISSION DE PUISSANCE
(KO) 전력 전달 효율이 향상된 마이크로파 플라즈마 발생기
Abstract:
(EN) The present invention relates to a microwave plasma generator improved in power transmission efficiency, which can compensate for impedance mismatching, due to plasma generated at one end of a coaxial cable of a microwave plasma generator, by changing the structure of a connection conductor electrically connecting an outer conductor and an inner conductor at the opposite end of the coaxial cable, thereby maximizing the efficiency of power transmission from a microwave power supply apparatus to the microwave plasma generator.
(FR) La présente invention concerne un générateur de plasma hyperfréquence amélioré en termes d'efficacité de transmission de puissance, qui peut compenser une désadaptation d'impédance, due au plasma généré au niveau d'une extrémité d'un câble coaxial d'un générateur de plasma hyperfréquence, en changeant la structure d'un conducteur de connexion connectant électriquement un conducteur externe et un conducteur interne au niveau de l'extrémité opposée du câble coaxial, maximisant ainsi l'efficacité de transmission de puissance d'un appareil d'alimentation électrique hyperfréquence au générateur de plasma hyperfréquence.
(KO) 본 발명은 마이크로파 플라즈마 발생기의 동축케이블의 일단부에서 발생되는 플라즈마에 의한 임피던스 부정합을, 동축케이블의 반대편 일단부에서 외부도체와 내부도체를 전기적으로 연결하는 연결도체의 구조를 변형하여 보상함으로써 마이크로파 전력 공급 장치에서 마이크로파 플라즈마 발생기로 전달되는 전력의 효율을 극대화할 수 있는 전력 전달 효율이 향상된 마이크로파 플라즈마 발생기에 관한 것이다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)