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1. (WO2019066365) CONDUCTIVE CONTACT PORTION AND ANISOTROPIC CONDUCTIVE SHEET COMPRISING SAME
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Pub. No.: WO/2019/066365 International Application No.: PCT/KR2018/011049
Publication Date: 04.04.2019 International Filing Date: 19.09.2018
IPC:
G01R 1/073 (2006.01) ,G01R 1/04 (2006.01) ,G01R 1/067 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
067
Measuring probes
073
Multiple probes
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
04
Housings; Supporting members; Arrangements of terminals
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
067
Measuring probes
Applicants:
주식회사 새한마이크로텍 SAE HAN MICRO TECH CO., LTD. [KR/KR]; 경기도 남양주시 진접읍 금강로1845번길 9 9, Geumgang-ro 1845beon-gil, Jinjeop-eup, Namyangju-si, Gyeonggi-do 12018, KR
Inventors:
전중수 JEON, Jung Su; KR
백병선 BAEK, Byeong Seon; KR
김석민 KIM, Suk Min; KR
Agent:
특허법인 다인 DYNE PATENT & LAW FIRM; 경기도 성남시 분당구 느티로 16, 제7층 705호 #705, 7th Floor, 16, Neuti-ro, Bundang-gu, Seongnam-si, Gyeonggi-do 13558, KR
Priority Data:
10-2017-012716429.09.2017KR
Title (EN) CONDUCTIVE CONTACT PORTION AND ANISOTROPIC CONDUCTIVE SHEET COMPRISING SAME
(FR) PARTIE DE CONTACT CONDUCTRICE ET FEUILLE CONDUCTRICE ANISOTROPE LA COMPRENANT
(KO) 전도성 접촉부 및 이를 포함하는 이방 전도성 시트
Abstract:
(EN) The present invention relates to an anisotropic conductive sheet used for a test socket or the like used to inspect a semiconductor element or the like and, more particularly, to an anisotropic conductive sheet comprising: a plurality of contact portions comprising conductive springs and conductive powder; and an insulating portion for supporting adjacent contact portions while insulating the same. The present invention provides an anisotropic conductive sheet arranged between an element (inspection target) and an inspection device so as to electrically connect a terminal of the element and a contact pad of the inspection device to each other. The anisotropic conductive sheet comprises: a plurality of conductive portions which are positioned to correspond to the terminal of the element and to the contact pad of the inspection device, and which have electric conductivity in the thickness direction; and an insulating portion which insulates adjacent contact portions from each other, and which supports the contact portions. Each contact portion comprises an elastic matrix, a conductive spring arranged inside the elastic matrix, and multiple conductive particles arranged in the thickness direction of the elastic matrix. The present invention is characterized in that the conductive particles are arranged on the peripheral portion of a wire member that constitutes the conductive spring at a density higher than in the case of the center portion of the elastic matrix. The present invention is advantageous in that, by arranging the conductive particles on the peripheral portion of the wire member that constitutes the conductive spring in a concentrated manner, the conductivity of the contact portions can be increased while reducing the amount of conductive particles.
(FR) La présente invention concerne une feuille conductrice anisotrope utilisée pour une prise d'essai ou analogue, utilisée pour inspecter un élément semi-conducteur ou analogue et, plus particulièrement, une feuille conductrice anisotrope comprenant : une pluralité de parties de contact comprenant des ressorts conducteurs et de la poudre conductrice ; et une partie isolante destinée à soutenir des parties de contact adjacentes tout en les isolant. La présente invention concerne une feuille conductrice anisotrope agencée entre un élément (cible d'inspection) et un dispositif d'inspection de façon à connecter électriquement une borne de l'élément et un plot de contact du dispositif d'inspection l'une avec l'autre. La feuille conductrice anisotrope comprend : une pluralité de parties conductrices qui sont positionnées afin de correspondre à la borne de l'élément et au plot de contact du dispositif d'inspection, et qui ont une conductivité électrique dans la direction de l'épaisseur ; et une partie isolante qui isole des parties de contact adjacentes les unes des autres, et qui soutient les parties de contact. Chaque partie de contact comprend une matrice élastique, un ressort conducteur agencé à l'intérieur de la matrice élastique, et de multiples particules conductrices agencées dans la direction de l'épaisseur de la matrice élastique. La présente invention est caractérisée en ce que les particules conductrices sont agencées sur la partie périphérique d'un élément filaire qui constitue le ressort conducteur à une densité supérieure à la densité dans le cas de la partie centrale de la matrice élastique. La présente invention est avantageuse en ce que, en agençant les particules conductrices sur la partie périphérique de l'élément filaire qui constitue le ressort conducteur d'une manière concentrée, la conductivité des parties de contact peut être accrue tout en réduisant la quantité de particules conductrices.
(KO) 본 발명은 반도체 소자 등의 검사에 사용되는 테스트용 소켓 등에 사용되는 이방 전도성 시트에 관한 것으로서, 더욱 상세하게는 전도성 스프링 및 전도성 파우더를 구비한 복수의 접촉부와 인접한 접촉부들을 절연시키며 지지하는 절연부를 구비한 이방 전도성 시트에 관한 것이다. 본 발명은 검사 대상인 소자와 검사 장치 사이에 배치되어 상기 소자의 단자와 검사 장치의 접촉 패드를 서로 전기적으로 연결하는 이방 전도성 시트를 제공한다. 이방 전도성 시트는 상기 소자의 단자 및 검사 장치의 접촉 패드에 대응하는 위치에 배치되며, 두께 방향으로 전기 전도성을 갖는 복수의 접촉부와, 인접한 접촉부들을 서로 절연시키며, 접촉부들을 지지하는 절연부를 포함한다. 그리고 상기 접촉부는, 탄성 매트릭스와, 상기 탄성 매트릭스 내에 배치되는 전도성 스프링과, 상기 탄성 매트릭스의 두께방향으로 배열되는 다수의 전도성 입자들을 포함한다. 본 발명은 상기 전도성 입자들이 상기 전도성 스프링을 이루는 선재의 주변부에 상기 탄성 매트릭스의 중심부에 비해 고밀도로 배치되는 것을 특징으로 한다. 본 발명은 전도성 입자들을 전도성 스프링을 이루는 선재의 주변부에 집중적으로 배치함으로써, 전도성 입자들의 양을 줄이면서도 접촉부의 전도성을 높일 수 있다는 장점이 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)