Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2019066256) SUBSTRATE TESTING CARTRIDGE AND METHOD FOR MANUFACTURING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/066256 International Application No.: PCT/KR2018/009595
Publication Date: 04.04.2019 International Filing Date: 21.08.2018
IPC:
G01R 1/04 (2006.01) ,G01R 1/073 (2006.01) ,G01R 31/28 (2006.01) ,G01R 3/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
04
Housings; Supporting members; Arrangements of terminals
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
067
Measuring probes
073
Multiple probes
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28
Testing of electronic circuits, e.g. by signal tracer
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
3
Apparatus or processes specially adapted for the manufacture of measuring instruments
Applicants:
한국생산기술연구원 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY [KR/KR]; 충청남도 천안시 서북구 입장면 양대기로길 89 89, Yangdaegiro-gil, Ipjang-myeon, Seobuk-gu Cheonan-si Chungcheongnam-do 31056, KR
Inventors:
남경태 NAM, Kyung Tae; KR
이상무 LEE, Sang Moo; KR
이승준 LEE, Seung Joon; KR
이광희 LEE, Kwang Hee; KR
추성원 CHOO, Sung Won; KR
Agent:
특허법인 이룸리온 ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM; 서울시 서초구 사평대로 108, 3층 (반포동) (Banpo-dong) 3rd Floor, 108, Sapyeong-daero, Seocho-gu Seoul 06575, KR
Priority Data:
10-2017-012631828.09.2017KR
Title (EN) SUBSTRATE TESTING CARTRIDGE AND METHOD FOR MANUFACTURING SAME
(FR) CARTOUCHE DE TEST DE SUBSTRATS ET PROCÉDÉ DE FABRICATION ASSOCIÉ
(KO) 기판 검사 카트리지 및 이의 제조 방법
Abstract:
(EN) The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.
(FR) L'invention concerne une cartouche de test de substrats servant à tester simultanément des substrats multiples pour lesquels un processus de traitement de substrat a été achevé, ainsi qu'un procédé de fabrication associé. Dans un mode de réalisation, la cartouche de test de substrats selon l'invention comprend : un élément mandrin sur lequel est placé un substrat; une carte sonde venant en contact avec le substrat et testant ce dernier, qui est positionnée de sorte à faire face à l'élément mandrin par rapport au substrat; et un élément de couplage destiné à coupler le substrat, l'élément mandrin et la carte sonde, l'élément de couplage comprenant : une partie couplage de substrat destinée à coupler le substrat et l'élément mandrin; et une partie couplage de mandrin destinée à coupler la carte sonde et l'élément mandrin.
(KO) 본 발명은 기판 처리 공정이 끝난 복수개의 기판을 동시에 검사하기 위해 제공되는 기판 검사 카트리지 및 이의 제조 방법에 에 관한 것이다. 본 발명의 일 실시 예에 따르면, 상기 기판이 놓이는 척 부재와 상기 기판과 접촉하여 상기 기판을 검사하고, 상기 기판을 기준으로 상기 척 부재와 마주보며 위치하는 프로브 카드와 그리고 상기 기판, 상기 척 부재 그리고 상기 프로브 카드를 결합시키는 결합 부재를 포함하되, 상기 결합 부재는 상기 기판과 상기 척부재를 결합시키는 기판 결합부와 상기 프로브 카드와 상기 척 부재를 결합시키는 척 결합부를; 포함하는 기판 검사 카트리지를 포함한다.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)