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1. (WO2019066205) AUTOMATED GUIDED VEHICLE, AND METHOD FOR GUIDING CASSETTE USING SAME
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Pub. No.: WO/2019/066205 International Application No.: PCT/KR2018/007283
Publication Date: 04.04.2019 International Filing Date: 27.06.2018
IPC:
H01L 21/677 (2006.01) ,H01L 21/67 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Applicants:
(주)윤텍 YUNTECH CO., LTD. [KR/KR]; 경기도 평택시 서탄면 금암2길 112-12 112-12, Geumam 2-gil, Seotan-myeon Pyeongtaek-si Gyeonggi-do 17704, KR
Inventors:
윤양수 YUN, Yang Su; KR
김주호 KIM, Ju Ho; KR
홍주장 HONG, Jujang; KR
Agent:
최훈식 CHOI, Hoon Sik; KR
Priority Data:
10-2017-012768029.09.2017KR
Title (EN) AUTOMATED GUIDED VEHICLE, AND METHOD FOR GUIDING CASSETTE USING SAME
(FR) VÉHICULE GUIDÉ AUTOMATISÉ ET PROCÉDÉ DE GUIDAGE DE CASSETTE L'UTILISANT
(KO) 자동반송대차 및 이를 이용한 카세트 반송 방법
Abstract:
(EN) An automated guided vehicle according to the present invention comprises: a body; a travelling unit installed under the body and travelling along a designated path; a slide unit installed above the travelling unit, and performing a rectilinear motion in the X, Y and Z directions and a first rotary motion about a first rotation axis so as to guide a cassette to a port of semiconductor processing equipment; a handle unit coupled to the front end of the slide unit, and performing a rectilinear motion in sync with the slide unit, and a second rotary motion about a second rotation axis, so as to load/unload the cassette to the port of the semiconductor processing equipment; a gripper unit coupled to the bottom of the handle unit and gripping the cassette; sensor units, provided at at least three spots of the handle unit, for detecting an accurate loading/unloading position of the cassette; and a control unit for controlling the operations of the aforementioned components.
(FR) La présente invention porte sur un véhicule guidé automatisé qui comprend : un corps ; une unité de déplacement installée sous le corps et se déplaçant le long d'un trajet désigné ; une unité à glissière installée au-dessus de l'unité de déplacement, et effectuant un mouvement rectiligne dans les directions X, Y et Z et un premier mouvement rotatif autour d'un premier axe de rotation de façon à guider une cassette jusqu'à un orifice d'un équipement de traitement de semi-conducteurs ; une unité de manipulation accouplée à l'extrémité avant de l'unité à glissière, et effectuant un mouvement rectiligne en synchronisme avec l'unité à glissière, et un second mouvement rotatif autour d'un second axe de rotation, de façon à charger la cassette dans l'orifice de l'équipement de traitement de semi-conducteurs et à l'en décharger ; une unité de préhension accouplée à la partie inférieure de l'unité de manipulation et saisissant la cassette ; des unités de capteur, disposées au niveau d'au moins trois points de l'unité de manipulation, pour détecter une position de chargement/déchargement précise de la cassette ; et une unité de commande pour commander les opérations des composants susmentionnés.
(KO) 본 발명에 따른 자동반송대차는, 몸체; 상기 몸체의 하부에 설치되어, 지정된 경로를 따라 주행하는 주행 유닛; 상기 주행 유닛의 상부에 설치되어, 반도체 공정 설비의 포트로 카세트를 반송하기 위해 X방향, Y방향, Z방향으로의 직선운동과 제1 회전축을 중심으로 제1 회전운동을 하는 슬라이드 유닛; 상기 슬라이드 유닛의 선단에 결합되어, 반도체 공정 설비의 포트로 카세트를 로딩/언로딩하기 위해 상기 슬라이드 유닛과 연동한 직선운동과 제2 회전축을 중심으로 제2 회전운동을 하는 핸들 유닛; 상기 핸들 유닛의 하단에 결합되어, 카세트를 그립핑하는 그립퍼 유닛; 상기 핸들 유닛의 적어도 3개 지점에 제공되어, 카세트의 정확한 로딩/언로딩 위치를 감지하기 위한 센서 유닛; 및 상기 구성요소들의 동작을 제어하기 위한 제어 유닛을 포함하는 것을 특징으로 한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)