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1. (WO2019065526) COMPOSITION FOR FORMING UNDERLAYER FILM FOR IMPRINTING, KIT, CURABLE COMPOSITION FOR IMPRINTING, LAMINATED BODY, METHOD FOR MANUFACTURING LAMINATED BODY, METHOD FOR MANUFACTURING CURED PRODUCT PATTERN, AND METHOD FOR MANUFACTURING CIRCUIT SUBSTRATE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/065526 International Application No.: PCT/JP2018/035139
Publication Date: 04.04.2019 International Filing Date: 21.09.2018
IPC:
H01L 21/027 (2006.01) ,B29C 59/02 (2006.01) ,C08F 2/48 (2006.01) ,C08F 20/20 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
59
Surface shaping, e.g. embossing; Apparatus therefor
02
by mechanical means, e.g. pressing
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
F
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
2
Processes of polymerisation
46
Polymerisation initiated by wave energy or particle radiation
48
by ultra-violet or visible light
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
F
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
20
Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide, or nitrile thereof
02
Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
10
Esters
20
of polyhydric alcohols or phenols
Applicants:
富士フイルム株式会社 FUJIFILM CORPORATION [JP/JP]; 東京都港区西麻布2丁目26番30号 26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 1068620, JP
Inventors:
下重 直也 SHIMOJU Naoya; JP
後藤 雄一郎 GOTO Yuichiro; JP
Agent:
特許業務法人特許事務所サイクス SIKS & CO.; 東京都中央区京橋一丁目8番7号 京橋日殖ビル8階 8th Floor, Kyobashi-Nisshoku Bldg., 8-7, Kyobashi 1-chome, Chuo-ku, Tokyo 1040031, JP
Priority Data:
2017-18485426.09.2017JP
Title (EN) COMPOSITION FOR FORMING UNDERLAYER FILM FOR IMPRINTING, KIT, CURABLE COMPOSITION FOR IMPRINTING, LAMINATED BODY, METHOD FOR MANUFACTURING LAMINATED BODY, METHOD FOR MANUFACTURING CURED PRODUCT PATTERN, AND METHOD FOR MANUFACTURING CIRCUIT SUBSTRATE
(FR) COMPOSITION POUR LA FORMATION D'UN FILM DE SOUS-COUCHE POUR IMPRESSION, KIT, COMPOSITION DURCISSABLE POUR IMPRESSION, CORPS STRATIFIÉ, PROCÉDÉ DE FABRICATION D'UN CORPS STRATIFIÉ, PROCÉDÉ DE FABRICATION D'UN MOTIF DE PRODUIT DURCI ET PROCÉDÉ DE FABRICATION D'UN SUBSTRAT DE CIRCUIT
(JA) インプリント用下層膜形成用組成物、キット、インプリント用硬化性組成物、積層体、積層体の製造方法、硬化物パターンの製造方法および回路基板の製造方法
Abstract:
(EN) The present invention provides: a composition for forming an underlayer film for imprinting, the composition being capable of forming a stable film which has uniform thickness and to which a curable composition for imprinting shows excellent wettability; a kit; a curable composition for imprinting; a laminated body; a method for manufacturing a laminated body; a method for manufacturing a cured product pattern, and a method for manufacturing a circuit substrate. The composition for forming an underlayer film for imprinting comprises a solvent and a multifunctional (meth)acrylate that includes at least one of an aromatic ring and an aromatic heterocyclic ring, the multifunctional (meth)acrylate having a viscosity at 23ºC of 11-600 mPa·s and a molecular weight of 200 or more.
(FR) La présente invention concerne : une composition pour la formation d'un film de sous-couche pour impression, la composition pouvant former un film stable qui présente une épaisseur uniforme et auquel une composition durcissable pour impression confère une excellente mouillabilité ; un kit ; une composition durcissable pour impression ; un corps stratifié ; un procédé de fabrication d'un corps stratifié ; un procédé de fabrication d'un motif de produit durci et un procédé de fabrication d'un substrat de circuit. La composition pour la formation d'un film de sous-couche pour impression comprend un solvant et un (méth)acrylate multifonctionnel qui comprend au moins l'un parmi un noyau aromatique et un noyau hétérocyclique aromatique, le (méth)acrylate multifonctionnel présentant une viscosité à 23 °C égale à 11 à 600 mPa·s et un poids moléculaire supérieur ou égal à 200.
(JA) 形成された膜の厚さの均一性とインプリント用硬化性組成物の濡れ性に優れ、形成される膜が安定であるインプリント用下層膜形成用組成物、キット、インプリント用硬化性組成物、積層体、積層体の製造方法、硬化物パターンの製造方法および回路基板の製造方法を提供する。芳香環および芳香族複素環の少なくとも1種を含む多官能(メタ)アクリレートと溶剤を含み、多官能(メタ)アクリレートは、23℃における粘度が11~600mPa・sであり、分子量が200以上である、インプリント用下層膜形成用組成物。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)