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1. (WO2019065244) METHOD FOR PRODUCING MAGNETIC SENSOR AND MAGNETIC SENSOR ASSEMBLY
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Pub. No.: WO/2019/065244 International Application No.: PCT/JP2018/033810
Publication Date: 04.04.2019 International Filing Date: 12.09.2018
IPC:
G01R 33/02 (2006.01) ,H01L 43/12 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
33
Arrangements or instruments for measuring magnetic variables
02
Measuring direction or magnitude of magnetic fields or magnetic flux
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
43
Devices using galvano-magnetic or similar magnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
12
Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Applicants:
昭和電工株式会社 SHOWA DENKO K.K. [JP/JP]; 東京都港区芝大門一丁目13番9号 13-9, Shiba Daimon 1-chome, Minato-ku, Tokyo 1058518, JP
Inventors:
遠藤 大三 ENDO, Daizo; JP
Agent:
古部 次郎 FURUBE, Jiro; JP
加藤 謹矢 KATO, Kinya; JP
Priority Data:
2017-19044829.09.2017JP
Title (EN) METHOD FOR PRODUCING MAGNETIC SENSOR AND MAGNETIC SENSOR ASSEMBLY
(FR) PROCÉDÉ DE PRODUCTION D'UN CAPTEUR MAGNÉTIQUE ET ENSEMBLE CAPTEUR MAGNÉTIQUE
(JA) 磁気センサの製造方法及び磁気センサ集合体
Abstract:
(EN) Provided is a method for producing a magnetic sensor, the method comprising: a soft-magnetic-layer-deposition step in which a soft magnetic layer 101 constituting a magnetic field sensing part 21 is deposited on a substrate 10 by magnetron sputtering; and a sensing-part-forming step for forming the magnetic field sensing part 21 in a portion of the soft magnetic layer 101, the portion having uniaxial magnetic anisotropy due to the magnetic field used for magnetron sputtering.
(FR) L'invention concerne un procédé de production d'un capteur magnétique, le procédé comprenant : le dépôt d'une couche magnétique molle dans laquelle une couche magnétique molle (101) constituant une partie de détection de champ magnétique (21) est déposée sur un substrat (10) par pulvérisation magnétron ; et la formation d'une partie de détection permettant de former la partie de détection de champ magnétique (21) dans une partie de la couche magnétique molle (101), la partie présentant une anisotropie magnétique uniaxiale due au champ magnétique utilisé pour la pulvérisation magnétron.
(JA) 磁気センサの製造方法は、マグネトロンスパッタリングにより、基板10上に磁界を感受する感受部21を構成する軟磁性体層101を堆積する軟磁性体層堆積工程と、軟磁性体層101のマグネトロンスパッタリングに用いた磁界により一軸磁気異方性が付与された部分に、磁界を感受する感受部21を形成する感受部形成工程とを含む。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)