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1. (WO2019065225) METHOD FOR MANUFACTURING HARD CARBON-BASED COATING, AND COATED MEMBER
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Pub. No.: WO/2019/065225 International Application No.: PCT/JP2018/033716
Publication Date: 04.04.2019 International Filing Date: 11.09.2018
IPC:
C23C 26/00 (2006.01) ,B23B 27/14 (2006.01) ,B23B 27/20 (2006.01) ,C23C 14/00 (2006.01) ,C23C 14/06 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
26
Coating not provided for in groups C23C2/-C23C24/87
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B
TURNING; BORING
27
Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
14
Cutting tools of which the bits or tips are of special material
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
B
TURNING; BORING
27
Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
14
Cutting tools of which the bits or tips are of special material
20
with diamond bits
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
Applicants:
住友電気工業株式会社 SUMITOMO ELECTRIC INDUSTRIES, LTD. [JP/JP]; 大阪府大阪市中央区北浜四丁目5番33号 5-33, Kitahama 4-chome, Chuo-ku, Osaka-shi, Osaka 5410041, JP
D.N.A.メタル株式会社 D.N.A. METAL COMPANY, LIMITED [JP/JP]; 大阪府茨木市大池1丁目8-16 8-16, Oike 1-chome, Ibaraki-shi, Osaka 5670826, JP
Inventors:
西林 良樹 NISHIBAYASHI Yoshiki; JP
前田 茂樹 MAEDA Shigeki; JP
Agent:
山野 宏 YAMANO Hiroshi; JP
Priority Data:
2017-18502726.09.2017JP
Title (EN) METHOD FOR MANUFACTURING HARD CARBON-BASED COATING, AND COATED MEMBER
(FR) PROCÉDÉ DE FABRICATION D'UN REVÊTEMENT À BASE DE CARBONE DUR ET ÉLÉMENT REVÊTU
(JA) 硬質炭素系被膜の製造方法、及び被膜付き部材
Abstract:
(EN) The method for manufacturing a hard carbon-based coating according to the present invention comprises: a step A for preparing a coating-forming apparatus having a power source device and a discharge electrode containing a carbon material, and preparing a substrate comprising a surface on which the coating is to be formed; and a step B for using the coating-forming apparatus to repeatedly discharge between the discharge electrode and the substrate in a prescribed coating formation atmosphere, thereby forming a hard carbon-based coating on the surface. Step B is performed under conditions such that the coating formation atmosphere and/or the discharge electrode contains at least one of hydrogen atoms, oxygen atoms, water molecules, and carbon dioxide molecules.
(FR) L'invention concerne un procédé de fabrication d'un revêtement à base de carbone dur comprenant : une étape A pour préparer un appareil de formation de revêtement ayant un dispositif de source d'alimentation et une électrode de décharge contenant un matériau de carbone, et préparer un substrat comprenant une surface sur laquelle le revêtement doit être formé; et une étape B pour utiliser l'appareil de formation de revêtement pour effectuer une décharge répétée entre l'électrode de décharge et le substrat dans une atmosphère de formation de revêtement prescrite, formant ainsi un revêtement à base de carbone dur sur la surface. L'étape B est réalisée dans des conditions telles que l'atmosphère de formation de revêtement et/ou l'électrode de décharge contiennent au moins l'un d'atomes d'hydrogène, d'atomes d'oxygène, de molécules d'eau et de molécules de dioxyde de carbone.
(JA) 電源装置と炭素材料を含む放電電極とを有する成膜装置、及び被膜が形成される表面を有する基材を準備する工程Aと、前記成膜装置によって、所定の成膜雰囲気の下、前記放電電極と前記基材との間に繰り返し放電を発生させることで、前記表面に硬質炭素系被膜を形成する工程Bと、を備え、前記工程Bは、前記成膜雰囲気及び前記放電電極の少なくとも一方が、水素原子、酸素原子、水分子、及び二酸化炭素分子の少なくとも一つを含む条件で行う硬質炭素系被膜の製造方法。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)