Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2019064891) SUBSTRATE TRANSPORT DEVICE AND METHOD FOR DETERMINING POSITIONAL RELATIONSHIP BETWEEN SUBSTRATE TRANSPORT ROBOT AND SUBSTRATE CARRYING UNIT
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/064891 International Application No.: PCT/JP2018/028493
Publication Date: 04.04.2019 International Filing Date: 30.07.2018
IPC:
H01L 21/677 (2006.01) ,B25J 9/22 (2006.01) ,B65G 49/07 (2006.01) ,H01L 21/68 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
16
Programme controls
22
Recording or playback systems
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
07
for semiconductor wafers
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68
for positioning, orientation or alignment
Applicants:
川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP/JP]; 兵庫県神戸市中央区東川崎町3丁目1番1号 1-1, Higashikawasaki-cho 3-chome, Chuo-ku, Kobe-shi, Hyogo 6508670, JP
Inventors:
吉田 雅也 YOSHIDA, Masaya; --
野口 健治 NOGUCHI, Kenji; --
岡田 拓之 OKADA, Hiroyuki; --
Agent:
特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE; 兵庫県神戸市中央区東町123番地の1 貿易ビル3階 3rd Fl., Bo-eki Bldg., 123-1, Higashimachi, Chuo-ku, Kobe-shi, Hyogo 6500031, JP
Priority Data:
2017-19161929.09.2017JP
Title (EN) SUBSTRATE TRANSPORT DEVICE AND METHOD FOR DETERMINING POSITIONAL RELATIONSHIP BETWEEN SUBSTRATE TRANSPORT ROBOT AND SUBSTRATE CARRYING UNIT
(FR) DISPOSITIF DE TRANSPORT DE SUBSTRAT ET PROCÉDÉ DE DÉTERMINATION DE RELATION DE POSITION ENTRE UN ROBOT DE TRANSPORT DE SUBSTRAT ET UNE UNITÉ TRANSPORTEUSE DE SUBSTRAT
(JA) 基板搬送装置及び基板搬送ロボットと基板載置部との位置関係を求める方法
Abstract:
(EN) The invention comprises: a step of detecting, with an object detection sensor, a portion of the surface of a target in a plurality of rotational positions where a rotational position when the rotational axis of the target on a substrate carrying unit serves as the rotational center and/or a rotational position when a robot reference axis in a detection region serves as the rotation center is changed, wherein the portion of the surface of the target is positioned at the inner side of a predetermined circle, which is centered on the rotational axis, through which the target passes; a step of determining, for each of the plurality of rotational positions, a quantity correlated with a reference length, which represents the distance from the robot reference axis to the target when the target is detected with the object detection sensor; and a step of determining the positional relationship between the robot reference axis and the rotational axis on the basis of the rotational position, from among the plurality of rotation positions, for which the quantity correlated with the reference length is maximum or minimum.
(FR) L'invention comprend : une étape de détection, à l'aide d'un capteur de détection d'objet, d'une partie de la surface d'une cible dans une pluralité de positions de rotation, une position de rotation lorsque l'axe de rotation de la cible sur une unité transporteuse de substrat sert de centre de rotation et/ou une position de rotation lorsqu'un axe de référence de robot dans une région de détection sert de centre de rotation étant changées, et la partie de la surface de la cible étant positionnée sur le côté interne d'un cercle prédéfini, qui est centré sur l'axe de rotation, par lequel passe la cible ; une étape de détermination, pour chaque position de rotation de la pluralité de positions de rotation, d'une quantité corrélée à une longueur de référence, qui représente la distance de l'axe de référence de robot à la cible lorsque la cible est détectée à l'aide du capteur de détection d'objet ; et une étape de détermination de la relation de position entre l'axe de référence de robot et l'axe de rotation sur la base de la position de rotation, parmi la pluralité de positions de rotation, pour laquelle la quantité corrélée à la longueur de référence est maximale ou minimale.
(JA) 基板載置部上のターゲットの回転軸を回転中心とする回転位置、及び、検出領域のロボット基準軸を回転中心とする回転位置のうち少なくとも一方を変化させた複数の回転位置において、ターゲットの表面の一部分であって回転軸を中心とし且つターゲットを通過する所定の円周の内周側に位置する部分を物体検出センサで検出するステップと、複数の回転位置の各々について、物体検出センサでターゲットを検出したときのロボット基準軸からターゲットまでの距離を表す指標長さと相関関係のある量を求めるステップと、複数の回転位置のうち指標長さと相関関係のある量が最大又は最小になるものに基づいて、ロボット基準軸と回転軸との位置関係を求めるステップとを含む。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)