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1. (WO2019064876) TESTING SYSTEM AND TESTING METHOD
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Pub. No.: WO/2019/064876 International Application No.: PCT/JP2018/028245
Publication Date: 04.04.2019 International Filing Date: 27.07.2018
IPC:
H01L 21/66 (2006.01) ,G01R 31/26 (2014.01) ,G01R 31/28 (2006.01) ,H01L 21/02 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66
Testing or measuring during manufacture or treatment
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
26
Testing of individual semiconductor devices
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28
Testing of electronic circuits, e.g. by signal tracer
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
Applicants:
東京エレクトロン株式会社 TOKYO ELECTRON LIMITED [JP/JP]; 東京都港区赤坂五丁目3番1号 3-1 Akasaka 5-chome, Minato-ku, Tokyo 1076325, JP
Inventors:
加賀美 徹也 KAGAMI Tetsuya; JP
Agent:
高山 宏志 TAKAYAMA Hiroshi; JP
Priority Data:
2017-18755928.09.2017JP
Title (EN) TESTING SYSTEM AND TESTING METHOD
(FR) SYSTÈME DE TEST ET PROCÉDÉ DE TEST
(JA) 検査システムおよび検査方法
Abstract:
(EN) This testing system comprises a prober, a tester, a prober control unit for controlling the prober, and a tester control unit for controlling the tester, wherein the tester control unit causes the tester to execute a test which is composed of a plurality of parts on a device to be tested formed on a test body in addition to acquiring an estimated test ending time when the test has reached a predetermined stage, and sends a control signal to the prober control unit so as to transfer the test body into a testing chamber housing the tester before the estimated test ending time.
(FR) Ce système de test comprend un sondeur, un testeur, une unité de commande de sondeur pour commander le sondeur, et une unité de commande de testeur pour commander le testeur; l'unité de commande de testeur amène le testeur à exécuter un test qui est composé d'une pluralité de parties sur un dispositif à tester formé sur un corps de test en plus de l'acquisition d'un temps de fin de test estimé lorsque le test a atteint une étape prédéterminée, et envoie un signal de commande à l'unité de commande de sondeur de façon à transférer le corps de test dans une chambre d'essai abritant le testeur avant le temps de fin de test estimé.
(JA) プローバと、テスタと、プローバを制御するプローバ制御部と、テスタを制御するテスタ制御部とを備えた検査システムであって、テスタ制御部は、テスタに被検査体に形成された被検査デバイスに対し、複数のパートから構成される検査を実行させるとともに、検査が所定の段階に達した際に、検査終了予定時刻を取得し、該検査終了予定時刻までに、被検査体がテスタを収容する検査室へ搬送されるように、プローバ制御部へ制御信号を送信する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)