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1. (WO2019064420) VAPOR DEPOSITION MASK AND VAPOR DEPOSITION MASK MANUFACTURING METHOD
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Pub. No.: WO/2019/064420 International Application No.: PCT/JP2017/035195
Publication Date: 04.04.2019 International Filing Date: 28.09.2017
IPC:
C23C 14/24 (2006.01) ,H05B 33/10 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
10
Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Applicants:
シャープ株式会社 SHARP KABUSHIKI KAISHA [JP/JP]; 大阪府堺市堺区匠町1番地 1, Takumi-cho, Sakai-ku, Sakai City, Osaka 5908522, JP
Inventors:
山渕 浩二 YAMABUCHI, Koji; --
西口 昌男 NISHIGUCHI, Masao; --
Agent:
特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK; 大阪府大阪市北区天神橋2丁目北2番6号 大和南森町ビル Daiwa Minamimorimachi Building, 2-6, Tenjinbashi 2-chome Kita, Kita-ku, Osaka-shi, Osaka 5300041, JP
Priority Data:
Title (EN) VAPOR DEPOSITION MASK AND VAPOR DEPOSITION MASK MANUFACTURING METHOD
(FR) MASQUE POUR DÉPÔT EN PHASE VAPEUR ET PROCÉDÉ DE PRODUCTION DE MASQUE POUR DÉPÔT EN PHASE VAPEUR
(JA) 蒸着マスク及び蒸着マスクの製造方法
Abstract:
(EN) In the present invention, first regions (YA1) in an effective section (YA) formed in a mask sheet (15) are provided for each of active regions (3) of a substrate to be vapor-deposited and have a shape corresponding to each of the active regions (3). Second regions (YA2) of the effective section (YA) are outside the first regions (YA1), and a plurality of vapor deposition holes (H) are shielded by a howling sheet (13).
(FR) Dans la présente invention, des premières régions (YA1) dans une section efficace (YA) formées dans une feuille de masque (15) sont prévues pour chacune des régions actives (3) d'un substrat destiné au dépôt en phase vapeur et ont une forme correspondant à chacune des régions actives (3). Des secondes régions (YA2) de la section efficace (YA) sont à l'extérieur des premières régions (YA1), et une pluralité de trous de dépôt en phase vapeur (H) sont protégés par une feuille sonore (13).
(JA) マスクシート(15)に形成された有効部(YA)のうち第1領域(YA1)は、被蒸着基板のアクティブ領域(3)毎に設けられアクティブ領域(3)に対応する形状であり、有効部(YA)の第2領域(YA2)は、第1領域(YA1)外であって、ハウリングシート(13)により複数の蒸着孔(H)が遮蔽されている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)