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1. (WO2019064419) VAPOR DEPOSITION MASK AND VAPOR DEPOSITION MASK MANUFACTURING METHOD
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Pub. No.: WO/2019/064419 International Application No.: PCT/JP2017/035194
Publication Date: 04.04.2019 International Filing Date: 28.09.2017
IPC:
C23C 14/24 (2006.01) ,C23C 14/04 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
Applicants:
シャープ株式会社 SHARP KABUSHIKI KAISHA [JP/JP]; 大阪府堺市堺区匠町1番地 1, Takumi-cho, Sakai-ku, Sakai City, Osaka 5908522, JP
Inventors:
山渕 浩二 YAMABUCHI, Koji; --
中島 信作 NAKAJIMA, Shinsaku; --
Agent:
特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK; 大阪府大阪市北区天神橋2丁目北2番6号 大和南森町ビル Daiwa Minamimorimachi Building, 2-6, Tenjinbashi 2-chome Kita, Kita-ku, Osaka-shi, Osaka 5300041, JP
Priority Data:
Title (EN) VAPOR DEPOSITION MASK AND VAPOR DEPOSITION MASK MANUFACTURING METHOD
(FR) MASQUE POUR DÉPÔT EN PHASE VAPEUR ET PROCÉDÉ DE PRODUCTION DE MASQUE POUR DÉPÔT EN PHASE VAPEUR
(JA) 蒸着マスク及び蒸着マスクの製造方法
Abstract:
(EN) In the present invention, effective sections (YA) formed in a mask sheet (15) are provided so as to extend over a plurality of active regions (3) of a substrate to be vapor-deposited. The effective sections (YA) have a first region (YA1) and second regions (YA2). The first region (YA1) is provided in a shape corresponding to each of the active regions (3). In the second regions (YA2), a shielding section (25) that is outside the first region (YA1) and that shields a plurality of vapor deposition holes (H) is provided.
(FR) Dans la présente invention, des sections efficaces (YA) sont formées dans une feuille de masque (15) disposées de façon à s'étendre sur une pluralité de régions actives (3) d'un substrat devant faire l'objet d'un dépôt en phase vapeur. Les sections efficaces (YA) ont une première région (YA1) et des secondes régions (YA2). La première région (YA1) présente une forme correspondant à chacune des régions actives (3). Les secondes régions (YA2) comprennent une section de protection (25) qui est à l'extérieur de la première région (YA1) et qui protège une pluralité de trous de dépôt en phase vapeur (H).
(JA) マスクシート(15)に形成された有効部(YA)は被蒸着基板の複数のアクティブ領域(3)に跨るように設けられ、有効部(YA)は、第1領域(YA1)および第2領域(YA2)を有し、第1領域(YA1)は、アクティブ領域(3)毎にアクティブ領域(3)に対応する形状に設けられ、第2領域(YA2)には、第1領域(YA1)外であって、複数の蒸着孔(H)を遮蔽する遮蔽部(25)が設けられている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)