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1. (WO2019064418) VAPOR DEPOSITION MASK AND METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK
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Pub. No.: WO/2019/064418 International Application No.: PCT/JP2017/035188
Publication Date: 04.04.2019 International Filing Date: 28.09.2017
IPC:
C23C 14/04 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
Applicants:
シャープ株式会社 SHARP KABUSHIKI KAISHA [JP/JP]; 大阪府堺市堺区匠町1番地 1, Takumi-cho, Sakai-ku, Sakai City, Osaka 5908522, JP
Inventors:
中島 信作 NAKAJIMA, Shinsaku; --
Agent:
特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK; 大阪府大阪市北区天神橋2丁目北2番6号 大和南森町ビル Daiwa Minamimorimachi Building, 2-6, Tenjinbashi 2-chome Kita, Kita-ku, Osaka-shi, Osaka 5300041, JP
Priority Data:
Title (EN) VAPOR DEPOSITION MASK AND METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK
(FR) MASQUE DE DÉPÔT EN PHASE VAPEUR ET PROCÉDÉ DE FABRICATION DE MASQUE DE DÉPÔT EN PHASE VAPEUR
(JA) 蒸着マスク及び蒸着マスクの製造方法
Abstract:
(EN) An effective section (YA) formed in a mask sheet (15) has a first region (YA1) and second regions (YA2), the first region (YA1) is provided in each active region (3) of a substrate to be subjected to vapor deposition, and has a shape corresponding to the active region (3), and the second regions (YA2) are outside of the first region (YA1), and are respectively provided with blocking sections (25) for blocking a plurality of vapor deposition holes (H).
(FR) Selon la présente invention, une section efficace (YA) formée dans une feuille de masque (15) comporte une première région (YA1) et des deuxièmes régions (YA2), la première région (YA1) est disposée dans chaque région active (3) d’un substrat à soumettre à un dépôt en phase vapeur, et a une forme correspondant à la région active (3), et les deuxièmes régions (YA2) sont à l’extérieur de la première région (YA1), et sont respectivement pourvues de sections de blocage (25) pour bloquer une pluralité de trous de dépôt en phase vapeur (H).
(JA) マスクシート(15)に形成された有効部(YA)は第1領域(YA1)および第2領域(YA2)を有し、第1領域(YA1)は、被蒸着基板のアクティブ領域(3)毎に設けられ、アクティブ領域(3)に対応する形状であり、第2領域(YA2)は、第1領域(YA1)外であって、複数の蒸着孔(H)を遮蔽する遮蔽部(25)が設けられている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)