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1. (WO2019063794) MULTI-CELL DETECTOR FOR CHARGED PARTICLES
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Pub. No.: WO/2019/063794 International Application No.: PCT/EP2018/076477
Publication Date: 04.04.2019 International Filing Date: 28.09.2018
IPC:
H01J 37/244 (2006.01) ,H01L 27/146 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
244
Detectors; Associated components or circuits therefor
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14
including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
144
Devices controlled by radiation
146
Imager structures
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
WANG, Joe; US
WANG, Yongxin; US
CHEN, Zhongwei; US
HU, Xuerang; US
Agent:
PETERS, John; NL
Priority Data:
62/566,10229.09.2017US
Title (EN) MULTI-CELL DETECTOR FOR CHARGED PARTICLES
(FR) DÉTECTEUR À CELLULES MULTIPLES POUR PARTICULES CHARGÉES
Abstract:
(EN) A multi-cell detector includes a first layer (420) having a region (422) of a first conductivity type and a second layer (440) including a plurality of regions (444) of a second conductivity type. The second layer may also include one or more regions (442) of the first conductivity type. The plurality of regions of the second conductivity type is partitioned from one another, perferably by the one or more regions (444) of the first conductivity type of the second layer. The plurality of regions (444) of the second conductivity type may be spaced apart from one or more regions (442) of the first conductivity type in the second layer. The detector further includes an intrinsic layer (430,432) between the first and second layers.
(FR) Un détecteur à cellules multiples peut comprendre une première couche (420) ayant une région (422) d'un premier type de conductivité et une seconde couche (440) comprenant une pluralité de régions (444) d'un second type de conductivité. La seconde couche peut également comprendre une ou plusieurs régions (442) du premier type de conductivité. La pluralité de régions du second type de conductivité peuvent être séparées les unes des autres, de préférence par la ou les régions (444) du premier type de conductivité de la seconde couche. La pluralité de régions (444) du second type de conductivité peuvent être espacées d'une ou de plusieurs régions (442) du premier type de conductivité dans la seconde couche. Le détecteur peut en outre comprendre une couche intrinsèque (430,432) entre les première et seconde couches.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)