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1. (WO2019063637) ASSEMBLY AND CONTAINER FOR PHYSICAL VAPOR DEPOSITION WITH HEAT DISSIPATION
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Pub. No.: WO/2019/063637 International Application No.: PCT/EP2018/076170
Publication Date: 04.04.2019 International Filing Date: 26.09.2018
IPC:
C23C 14/24 (2006.01) ,C23C 14/30 (2006.01) ,H01J 37/305 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
28
by wave energy or particle radiation
30
by electron bombardment
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30
Electron-beam or ion-beam tubes for localised treatment of objects
305
for casting, melting, evaporating, or etching
Applicants:
ESSILOR INTERNATIONAL [FR/FR]; 147, rue de Paris 94220 CHARENTON-LE-PONT, FR
Inventors:
PAGNON, Philippe; FR
Agent:
PETIT, Maxime; FR
TESSIER, Benoît; FR
PEGUET, Wilfried; FR
Priority Data:
17306283.727.09.2017EP
Title (EN) ASSEMBLY AND CONTAINER FOR PHYSICAL VAPOR DEPOSITION WITH HEAT DISSIPATION
(FR) ENSEMBLE ET RÉCIPIENT POUR DÉPÔT PHYSIQUE EN PHASE VAPEUR AVEC DISSIPATION THERMIQUE
Abstract:
(EN) It is proposed an assembly (10) comprising: - a crucible (12) comprising at least one cavity (16), - a container (14) for a material (15) to be vaporized, the container being intended to be disposed inside the cavity of the crucible and comprising: - a container lateral surface (20) comprising an upper part (24) and a lower part (26), the upper part being configured to be at least partially in surface contact with a cavity lateral surface when the container is disposed inside the cavity, the lower part being configured to be distant from the cavity lateral surface to form a free space (25) surrounding the container between the lower part and the cavity lateral surface when the container is disposed inside the cavity, and - a container bottom surface (28) configured to be at least partially in contact with a cavity bottom surface.
(FR) La présente invention concerne un ensemble (10) comprenant : - un creuset (12) comprenant au moins une cavité (16), - un récipient (14) pour un matériau (15) à vaporiser, le récipient étant destiné à être disposé à l'intérieur de la cavité du creuset et comprenant : - une surface latérale de récipient (20) comprenant une partie supérieure (24) et une partie inférieure (26), la partie supérieure étant configurée pour être au moins partiellement en contact de surface avec une surface latérale de cavité lorsque le récipient est disposé à l'intérieur de la cavité, la partie inférieure étant configurée pour être distante de la surface latérale de cavité pour former un espace libre (25) entourant le récipient entre la partie inférieure et la surface latérale de cavité lorsque le récipient est disposé à l'intérieur de la cavité, et - une surface inférieure de récipient (28) configurée pour être au moins partiellement en contact avec une surface inférieure de cavité.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)