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1. (WO2019063532) METHODS OF INSPECTING SAMPLES WITH MULTIPLE BEAMS OF CHARGED PARTICLES
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Pub. No.: WO/2019/063532 International Application No.: PCT/EP2018/075930
Publication Date: 04.04.2019 International Filing Date: 25.09.2018
IPC:
H01J 37/22 (2006.01) ,H01J 37/28 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
22
Optical or photographic arrangements associated with the tube
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
28
with scanning beams
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
LIU, Kuo-Shih; US
LIU, Xuedong; US
FANG, Wei; US
JAU, Jack; US
Agent:
PETERS, John; NL
Priority Data:
62/566,17729.09.2017US
Title (EN) METHODS OF INSPECTING SAMPLES WITH MULTIPLE BEAMS OF CHARGED PARTICLES
(FR) PROCÉDÉS D'INSPECTION D'ÉCHANTILLONS AVEC DE MULTIPLES FAISCEAUX DE PARTICULES CHARGÉES
Abstract:
(EN) Disclosed herein is a method comprising: generating a plurality of probe spots (310A-310C) on a sample by a plurality of beams of charged particles; while scanning the plurality of probe spots across a region (300) on the sample, recording from the plurality of probe spots a plurality of sets of signals respectively representing interactions of the plurality of beams of charged particles and the sample; generating a plurality of images (361-363) of the region (300) respectively from the plurality of sets of signals; and generating a composite image of the region from the plurality of images.
(FR) L'invention concerne un procédé consistant à : générer une pluralité de points de sonde (310A-310C) sur un échantillon par une pluralité de faisceaux de particules chargées; tout en balayant la pluralité de points de sonde à travers une région (300) sur l'échantillon, enregistrant à partir de la pluralité de points de sonde une pluralité d'ensembles de signaux représentant respectivement des interactions de la pluralité de faisceaux de particules chargées et de l'échantillon; générer une pluralité d'images (361-363) de la région (300) respectivement à partir de la pluralité d'ensembles de signaux; et générer une image composite de la région à partir de la pluralité d'images.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)