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1. (WO2019063513) METHOD AND DEVICE FOR TRANSPORTING SUBSTRATES
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Pub. No.: WO/2019/063513 International Application No.: PCT/EP2018/075876
Publication Date: 04.04.2019 International Filing Date: 25.09.2018
IPC:
H01L 21/673 (2006.01) ,H01L 21/677 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
Applicants:
JONAS & REDMANN AUTOMATIONSTECHNIK GMBH [DE/DE]; Kaiserin-Augusta-Allee 113 10553 Berlin, DE
Inventors:
VENHUES, Lars; DE
ANDERS, Olaf; DE
Agent:
PATENTANWÄLTE BRESSEL UND PARTNER MBB; Herr Lukas Ramrath Potsdamer Platz 10 10785 Berlin, DE
Priority Data:
10 2017 217 304.128.09.2017DE
Title (EN) METHOD AND DEVICE FOR TRANSPORTING SUBSTRATES
(FR) PROCÉDÉ ET DISPOSITIF DE TRANSPORT DE SUBSTRATS
(DE) VERFAHREN UND VORRICHTUNG ZUM TRANSPORT VON SUBSTRATEN
Abstract:
(EN) The invention relates to a method and to a device for transporting substrates (2), in particular for producing solar cells, wherein in a first transport step (TS1) a first carrier (C1) having a first number of substrates (2) is transported into a packing position (PP), in a first work step (AS1) at least one first substrate pack (8) is provided in the first carrier (C1), in a second transport step (TS2) the first carrier (C1) is moved into a transfer position (TP), in a second work step the at least first substrate pack (8) is transported from the first carrier (C1) into a first process boat (B1) and at least one further substrate pack (8) is transported from a process boat (B1, B2) into the first carrier (C1), in a third transport step (TS3) the first carrier (C1) is transported into an unpacking position (EP), and in a third work step (AS3) the at least one further substrate pack (8) is unpacked.
(FR) L'invention concerne un procédé et un dispositif servant au transport de substrats (2), en particulier servant à fabriquer des cellules solaires. Lors d'une première étape de transport (TS1), un premier transporteur (C1) comprenant un premier nombre de substrats (2) est transporté dans une position d'emballage (PP). Lors d'une première étape de travail (AS1), au moins un premier paquet de substrats (8) est fourni dans le premier transporteur (C1). Lors d'une deuxième étape de transport (TS2), le premier transporteur (C1) est déplacé dans une position de transfert (TP). Lors d'une deuxième étape de travail, le premier ou les premiers paquets de substrat (8) sont transportés par le premier transporteur (C1) dans une première barquette de traitement (B1) et au moins un autre paquet de substrats (8) est transporté par une barquette de traitement (B1, B2) dans le premier transporteur (C1). Lors d'une troisième étape de transport (TS3), le premier transporteur (C1) est transporté dans une position de déballage (EP), l'autre ou les autres paquets de substrats (8) étant déballés lors d'une troisième étape de travail (AS3).
(DE) Die Erfindung betrifft ein Verfahren und eine Vorrichtung zum Transport von Substraten (2), insbesondere zur Herstellung von Solarzellen, wobei in einem ersten Transportschritt (TS1 ) ein erster Carrier (C1) mit einer ersten Anzahl von Substraten (2) in eine Packposition (PP) transportiert wird, wobei in einem ersten Arbeitsschritt (AS1) mindestens ein erstes Substratpaket (8) in dem ersten Carrier (C1) bereitgestellt wird, wobei in einem zweiten Transportschritt (TS2) der erste Carrier (C1) in eine Transferposition (TP) bewegt wird, wobei in einem zweiten Arbeitsschritt das mindestens erste Substratpaket (8) von dem ersten Carrier (C1) in ein erstes Prozessboot (B1) und mindestens ein weiteres Substratpaket (8) von einem Prozessboot (B1, B2) in den ersten Carrier (C1) transportiert wird, wobei in einem dritten Transportschritt (TS3) der erste Carrier (C1) in eine Entpackposition (EP) transportiert wird, wobei in einem dritten Arbeitsschritt (AS3) das mindestens ein weiteres Substratpaket (8) entpackt wird.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)