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1. (WO2019063437) COMPENSATION OPTICAL SYSTEM FOR AN INTERFEROMETRIC MEASURING SYSTEM
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Pub. No.: WO/2019/063437 International Application No.: PCT/EP2018/075650
Publication Date: 04.04.2019 International Filing Date: 21.09.2018
IPC:
G01B 9/02 (2006.01) ,G01B 11/24 (2006.01) ,G01M 11/00 (2006.01) ,G02B 5/32 (2006.01) ,G02B 26/06 (2006.01) ,G02B 27/09 (2006.01) ,G01J 9/02 (2006.01) ,G03F 7/20 (2006.01) ,G01N 21/17 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
01
MEASURING; TESTING
M
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11
Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5
Optical elements other than lenses
32
Holograms used as optical elements
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
06
for controlling the phase of light
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
09
Beam shaping, e.g. changing the cross-sectioned area, not otherwise provided for
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
9
Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
02
by interferometric methods
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
Applicants:
CARL ZEISS SMT GMBH [DE/DE]; Rudolf-Eber-Strasse 2 73447 Oberkochen, DE
Inventors:
HETZLER, Jochen; DE
SCHULTE, Stefan; DE
Agent:
SUMMERER, Christian; DE
ZEUNER, Stefan; DE
Priority Data:
10 2017 217 369.629.09.2017DE
Title (EN) COMPENSATION OPTICAL SYSTEM FOR AN INTERFEROMETRIC MEASURING SYSTEM
(FR) OPTIQUE DE COMPENSATION POUR UN SYSTÈME DE MESURE INTERFÉROMÉTRIQUE
(DE) KOMPENSATIONSOPTIK FÜR EIN INTERFEROMETRISCHES MESSSYSTEM
Abstract:
(EN) The invention relates to a compensation optical system (30) for a measuring system (10), said measuring system being used to determine a form of an optical surface (12) of a test object (14) by interferometry and said compensation optical system being configured to produce, from an input wave (18), a measurement wave (44) that is directed on to the test object and that has a wavefront at least partially adapted to a required form of the optical surface. The compensation optical system comprises a first optical element (32) and a second optical element (34) arranged downstream of the first optical element in a beam path of the input wave. The second optical element is a diffractive optical element, which is configured to split the input wave, after interaction with the first optical element, into the measurement wave (44) and a reference wave (42). At least 20% of a refractive power of the entire compensation optical system (30), which is provided to produce the at least partially adapted wavefront of the measurement wave from a wavefront of the input wave, is accounted for by the first optical element (32) and the refractive power accounted for by the first optical element has the same sign as the refractive power of the entire compensation optical system.
(FR) L'invention concerne une optique de compensation (30) pour un système de mesure (10) servant à la détermination interférométrique d'une forme d'une surface optique (12) d'un objet en essai (14), laquelle est configurée pour générer, à partir d'une onde d'entrée (18), une onde de mesure (44) dirigée sur l'objet en essai avec un front d'onde au moins partiellement adapté à une forme voulue de la surface optique. L'optique de compensation comprend un premier élément optique (32) ainsi qu'un deuxième élément optique (34) disposé à la suite de celui-ci dans un trajet de rayon de l'onde d'entrée. Le deuxième élément optique est un élément optique diffractif qui est configuré pour dédoubler l'onde d'entrée en une onde de mesure (44) ainsi qu'une onde de référence (42) après l'interaction avec le premier élément optique. Au moins 20 % d'un pouvoir réfringent de l'optique de compensation (30) totale, laquelle est conçue pour générer le front d'onde au moins partiellement adapté de l'onde de mesure à partir d'un front d'onde de l'onde d'entrée, reviennent au premier élément optique (32), et le pouvoir réfringent qui revient au premier élément présente le même signe que le pouvoir réfringent de l'optique de compensation totale.
(DE) Eine Kompensationsoptik (30) für ein der interferometrischen Bestimmung einer Form einer optischen Oberfläche (12) eines Testobjekts (14) dienendes Messsystem (10) ist dazu konfiguriert, aus einer Eingangswelle (18) eine auf das Testobjekt gerichtete Messwelle (44) mit einer zumindest teilweise an eine Sollform der optischen Oberfläche angepassten Wellenfront zu erzeugen. Die Kompensationsoptik umfasst ein erstes optisches Element (32) sowie ein diesem in einem Strahlengang der Eingangswelle nachgeordnetes zweites optisches Element (34). Das zweite optische Element ist ein diffraktives optisches Element, welches dazu konfiguriert ist, die Eingangswelle nach Wechselwirkung mit dem ersten optischen Element in die Messwelle (44) sowie eine Referenzwelle (42) aufzuspalten. Mindestens 20% einer Brechkraft der gesamten Kompensationsoptik (30), welche zur Erzeugung der zumindest teilweise angepassten Wellenfront der Messwelle aus einer Wellenfront der Eingangswelle vorgesehen ist, entfällt auf das erste optische Element (32) und die auf das erste optische Element entfallende Brechkraft weist das gleiche Vorzeichen wie die Brechkraft der gesamten Kompensationsoptik auf.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)