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1. (WO2019063399) MEMS DEVICE HAVING SUPPRESSION OF FAULT MODES AND CORRESPONDING OPERATING METHOD
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Pub. No.: WO/2019/063399 International Application No.: PCT/EP2018/075431
Publication Date: 04.04.2019 International Filing Date: 20.09.2018
IPC:
B81B 3/00 (2006.01) ,G01C 19/5733 (2012.01)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5733
Structural details or topology
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
NEUL, Reinhard; DE
LASSL, Andreas; DE
DEGENFELD-SCHONBURG, Peter; DE
KUHLMANN, Nils Felix; DE
SCHATZ, Frank; DE
BODE, Niels; DE
KUEHNEL, Matthias; DE
Priority Data:
10 2017 217 009.326.09.2017DE
Title (EN) MEMS DEVICE HAVING SUPPRESSION OF FAULT MODES AND CORRESPONDING OPERATING METHOD
(FR) DISPOSITIF MEMS PRÉSENTANT UNE SUPPRESSION DES MODES PARASITES ET PROCÉDÉ DE FONCTIONNEMENT CORRESPONDANT
(DE) MEMS-VORRICHTUNG MIT UNTERDRÜCKUNG VON STÖRMODEN SOWIE ENTSPRECHENDES BETRIEBSVERFAHREN
Abstract:
(EN) The invention relates to a MEMS device and to a corresponding operating method. The MEMS device has a vibratory micromechanical system (100), which can be excited in a plurality of useful modes, wherein the vibratory micromechanical system (100) has at least one system component (1), which can be excited by an overlapping of the useful modes in at least one parasitic fault mode. According to the invention, there is a calibration unit (50), which is designed such that the calibration unit counteracts the parasitic fault mode by applying an electromagnetic interaction (W) to the system component (1).
(FR) L'invention concerne un dispositif MEMS et un procédé de fonctionnement correspondant. Le dispositif MEMS selon l'invention est conçu de manière à comporter un système micromécanique oscillant (100) pouvant être excité selon plusieurs modes d'utilisation. Ce système micromécanique oscillant (100) comporte au moins un composant de système (1) qui peut être excité selon au moins un mode parasite, par superposition des modes d'utilisation. Un dispositif de compensation (50) est prévu. Celui-ci est conçu pour contrecarrer le mode parasite par application d'une interaction électromagnétique (W) au composant de système (1).
(DE) Die Erfindung schafft eine MEMS-Vorrichtung sowie ein entsprechendes Betriebsverfahren. Die MEMS-Vorrichtung ist ausgestattet mit einem schwingungsfähigen mikromechanischen System (100), welches in einer Mehrzahl von Nutzmoden anregbar ist, wobei das schwingungsfähige mikromechanische System (100) mindestens eine Systemkomponente (1) aufweist, welche durch eine Überlagerung der Nutzmoden in mindestens einem parasitären Störmode anregbar ist. Es ist eine Abgleicheinrichtung (50) vorgesehen, welche derart gestaltet ist, dass sie durch Anlegen einer elektromagnetischen Wechselwirkung (W) an die Systemkomponente (1) dem parasitären Störmode entgegenwirkt.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)