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1. (WO2019063314) OPTICAL ARRANGEMENT FOR AN INSPECTION APPARATUS
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Pub. No.: WO/2019/063314 International Application No.: PCT/EP2018/074845
Publication Date: 04.04.2019 International Filing Date: 14.09.2018
IPC:
G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
ASML HOLDING N.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
KELKAR, Parag, Vinayak; US
KREUZER, Justin, Lloyd; US
Agent:
SLENDERS, Peter; NL
Priority Data:
62/565,02128.09.2017US
Title (EN) OPTICAL ARRANGEMENT FOR AN INSPECTION APPARATUS
(FR) AGENCEMENT OPTIQUE POUR APPAREIL D'INSPECTION
Abstract:
(EN) An inspection apparatus, including: an optical system configured to provide a beam of radiation to a surface to be measured and to receive redirected radiation from the surface; and a detection system configured to measure the redirected radiation, wherein the optical system includes an optical element to process the radiation, the optical element including a Mac Neille- type multilayer polarizing coating configured to produce a reduced chromatic offset of the radiation.
(FR) La présente invention concerne un appareil d'inspection qui comprend : un système optique configuré pour fournir un faisceau de rayonnement à une surface devant être mesurée et pour recevoir un rayonnement redirigé en provenance de la surface ; et un système de détection configuré pour mesurer le rayonnement redirigé, le système optique comprenant un élément optique pour traiter le rayonnement, l'élément optique comprenant un revêtement polarisant multicouche de type MacNeille configuré pour produire un décalage chromatique réduit du rayonnement.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)