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1. (WO2019063238) OPTICAL SENSING DEVICE AND METHOD FOR MANUFACTURING AN OPTICAL SENSING DEVICE
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Pub. No.: WO/2019/063238 International Application No.: PCT/EP2018/073374
Publication Date: 04.04.2019 International Filing Date: 30.08.2018
IPC:
G01J 3/26 (2006.01) ,G01J 3/28 (2006.01) ,G01J 3/36 (2006.01) ,G01J 3/51 (2006.01) ,H01L 27/14 (2006.01)
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12
Generating the spectrum; Monochromators
26
using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28
Investigating the spectrum
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28
Investigating the spectrum
30
Measuring the intensity of spectral lines directly on the spectrum itself
36
Investigating two or more bands of a spectrum by separate detectors
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
46
Measurement of colour; Colour measuring devices, e.g. colorimeters
50
using electric radiation detectors
51
using colour filters
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14
including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
Applicants:
AMS AG [AT/AT]; Schloss Premstätten Tobelbader Str. 30 8141 Premstätten, AT
Inventors:
ENICHLMAIR, Hubert; AT
EILMSTEINER, Gerhard; AT
Agent:
EPPING HERMANN FISCHER PATENTANWALTSGESELLSCHAFT MBH; Schloßschmidstr. 5 80639 München, DE
Priority Data:
17193871.528.09.2017EP
Title (EN) OPTICAL SENSING DEVICE AND METHOD FOR MANUFACTURING AN OPTICAL SENSING DEVICE
(FR) DISPOSITIF DE DÉTECTION OPTIQUE ET PROCÉDÉ DE FABRICATION DE DISPOSITIF DE DÉTECTION OPTIQUE
Abstract:
(EN) An optical sensing device (10) comprises a photodetector array (11) comprising at least one first photodetector (12) and at least one second photodetector (13), the photodetector array (11) being arranged on a semiconductor substrate (14). The optical sensing device (10) further comprises a filter stack (15) arranged on the substrate (14) and covering the photodetector array (11). The filter stack (15) comprises at least two first lower dielectric mirrors (16) and at least two second lower dielectric mirrors (17), where a first and a second lower mirror (16, 17) are arranged above the first photodetector (12) and a first and a second lower mirror (16, 7) are arranged above the second photodetector (13), and where the first lower mirrors (16) have a different thickness in vertical direction (z) which is perpendicular to the main plane of extension of the substrate (14) than the second lower mirrors (17). The filter stack (15) further comprises a spacer stack (18) arranged on the first and second lower mirrors (16, 17), and an upper dielectric mirror (19) arranged on the spacer stack (18) and covering the photodetector array (11). Furthermore, a method for manufacturing an optical sensing device (10) is provided.
(FR) L'invention concerne un dispositif de détection optique (10) comprenant un réseau de photodétecteurs (11) comprenant au moins un premier photodétecteur (12) et au moins un second photodétecteur (13), le réseau de photodétecteurs (11) étant disposé sur un substrat semi-conducteur (14). Le dispositif de détection optique (10) comprend en outre un empilement de filtres (15) disposé sur le substrat (14) et recouvrant le réseau de photodétecteurs (11). L'empilement de filtres (15) comprend au moins deux premiers miroirs diélectriques inférieurs (16) et au moins deux seconds miroirs diélectriques inférieurs (17), un premier et un second miroir inférieur (16, 17) étant agencés au-dessus du premier photodétecteur (12) et un premier et un second miroirs inférieurs (16, 7) étant agencés au-dessus du second photodétecteur (13), et les premiers miroirs inférieurs (16) présentant une épaisseur différente dans la direction verticale (z) perpendiculaire au plan principal d'extension du substrat (14) de celle des seconds miroirs inférieurs (17). L'empilement de filtres (15) comprend en outre un empilement d'espaceurs (18) disposé sur les premier et second miroirs inférieurs (16, 17), et un miroir diélectrique supérieur (19) disposé sur l'empilement d'espaceurs (18) et recouvrant le réseau de photodétecteurs (11). L'invention concerne en outre un procédé de fabrication d'un dispositif de détection optique (10).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)