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International application No. Applicant's or agent's file reference
PCT/EP2017/074360 23243P-WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
26 September 2017
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
The figure of the drawings to be published with the abstract is Figure No.     6    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
none of the figures is to be published with the abstract.


     C23C 14/04 (2006.01)i; H01L 21/677 (2006.01)i; C23C 16/04 (2006.01)i; C23C 14/56 (2006.01)i; C23C 16/44 (2006.01)i; H01L 21/68 (2006.01)i; B65G 49/07 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC


Minimum documentation searched (classification system followed by classification symbols):
     C23C; H01L; B65G
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal, WPI Data


Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
US 2017218499 A1 (LIU YAOYANG [CN] ET AL) 03 August 2017 (2017-08-03)
paragraphs [0029], [0031], [0032], [0044], [0045]; figure 2
US 2014116337 A1 (KIM HAK MIN [KR]) 01 May 2014 (2014-05-01)
paragraph [0057]
WO 2016091303 A1 (APPLIED MATERIALS INC [US]; BANGERT STEFAN [DE]; VERCESI TOMMASO [IT];) 16 June 2016 (2016-06-16)
figures 2b,3
US 9534288 B2 (SAMSUNG DISPLAY CO LTD [KR]) 03 January 2017 (2017-01-03)
column 9, lines 5-17; figure 5
Special categories of cited documents:
document defining the general state of the art which is not considered to be of particular relevance
earlier application or patent but published on or after the international filing date
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
document referring to an oral disclosure, use, exhibition or other means
document published prior to the international filing date but later than the priority date claimed
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
document member of the same patent family


Patent document cited in search report Publication date
Patent family member(s) Publication date
US 2017218499 A1
03 August 2017
CN 106637087 A
DE 102017112261 A1
US 2017218499 A1
10 May 2017
24 May 2018
03 August 2017
US 2014116337 A1
01 May 2014
CN 103789731 A
KR 20140053625 A
TW 201416478 A
US 2014116337 A1
14 May 2014
08 May 2014
01 May 2014
01 May 2014
WO 2016091303 A1
16 June 2016
CN 107002219 A
EP 3230488 A1
JP 2017538864 A
KR 20170092689 A
TW 201632645 A
US 2017342541 A1
WO 2016091303 A1
01 August 2017
18 October 2017
28 December 2017
11 August 2017
16 September 2016
30 November 2017
16 June 2016
US 9534288 B2
03 January 2017
KR 20140125184 A
US 2014312316 A1
28 October 2014
23 October 2014
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
06 July 2018
Date of mailing of the international search report:
16 July 2018
Authorized officer:
Castagné, Caroline
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