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1. (WO2019062941) PROJECTION OBJECTIVE
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Pub. No.: WO/2019/062941 International Application No.: PCT/CN2018/108745
Publication Date: 04.04.2019 International Filing Date: 29.09.2018
IPC:
G02B 13/18 (2006.01) ,G02B 13/14 (2006.01) ,G02B 13/22 (2006.01) ,G03F 7/20 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
13
Optical objectives specially designed for the purposes specified below
18
with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
13
Optical objectives specially designed for the purposes specified below
14
for use with infra-red or ultra-violet radiation
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
13
Optical objectives specially designed for the purposes specified below
22
Telecentric objectives or lens systems
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
上海微电子装备(集团)股份有限公司 SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO., LTD. [CN/CN]; 中国上海市 张江高科技园区张东路1525号 1525 Zhangdong Road, Zhangjiang High-Tech Park Shanghai 201203, CN
Inventors:
安福平 AN, Fuping; CN
褚兆祥 CHU, Zhaoxiang; CN
郭银章 GUO, Yinzhang; CN
Agent:
上海思微知识产权代理事务所(普通合伙) SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY; 中国上海市 黄浦区复兴中路1号申能国际大厦606-607室 Units 606-607, Shenergy International Building 1 Middle Fuxing Road, Huangpu District Shanghai 200021, CN
Priority Data:
201710909308.129.09.2017CN
Title (EN) PROJECTION OBJECTIVE
(FR) OBJECTIF DE PROJECTION
(ZH) 一种投影物镜
Abstract:
(EN) A projection objective, used for projecting an object space to an image space. The objective comprises, from the object space along an optical axis in sequence: a first lens set (G1) having positive focal power, a second lens set (G2) having negative focal power, a third lens set (G3) having positive focal power, a fourth lens set (G4) having negative focal power, and a fifth lens set (G5) having positive focal power. Aspheric lenses are provided in the first lens set (G1), the second lens set (G2), the third lens set (G3), the fourth lens set (G4), and the fifth lens set (G5). According to the design, the number of lenses is reduced, the structure of the objective is more compact, the transmittance of the objective is improved, the structural design of aspheric lenses is optimized, the asphericity of the aspheric lenses is reduced, the processing difficulty and costs for the aspheric lenses are reduced, and except for the above situations, the objective has a bitelecentric structure, and the sensitivity of the objective for micro irregularity defects on a mask surface is reduced.
(FR) La présente invention a trait à un objectif de projection qui sert à projeter un espace-objet vers un espace-image. L'objectif comprend, de manière séquentielle à partir de l'espace-objet le long d'un axe optique : un premier ensemble de lentilles (G1) ayant une puissance focale positive ; un deuxième ensemble de lentilles (G2) ayant une puissance focale négative ; un troisième ensemble de lentilles (G3) ayant une puissance focale positive ; un quatrième ensemble de lentilles (G4) ayant une puissance focale négative ; et un cinquième ensemble de lentilles (G5) ayant une puissance focale positive. Des lentilles asphériques se trouvent dans le premier ensemble de lentilles (G1), le deuxième ensemble de lentilles (G2), le troisième ensemble de lentilles (G3), le quatrième ensemble de lentilles (G4), et le cinquième ensemble de lentilles (G5). Conformément à la conception, le nombre de lentilles est réduit, la structure de l'objectif est plus compacte, la transmittance de cet objectif est améliorée, la conception structurale des lentilles asphériques est optimisée, l'asphéricité desdites lentilles asphériques est limitée, la difficulté et les coûts de traitement pour ces lentilles asphériques sont réduits, et, à l'exception des situations ci-dessus, ledit objectif a une structure bitélécentrique, et la sensibilité de l'objectif à des micro-défauts d'irrégularité sur une surface de masque est limitée.
(ZH) 一种投影物镜,用于将物方的图像投影至像方,物镜从物方开始沿光轴依次包括;具有正光焦度的第一透镜组(G1)、具有负光焦度的第二透镜组(G2)、具有正光焦度的第三透镜组(G3)、具有负光焦度的第四透镜组(G4)、以及具有正光焦度的第五透镜组(G5),在第一透镜组(G1)、第二透镜组(G2)、第四透镜组(G4)和第五透镜组(G5)设有非球面镜面的透镜,采用此设计减少了透镜的个数,使得物镜结构更加紧凑,提升了物镜的透过率,优化了非球面镜面的结构设计,降低其非球面度,减少了非球面镜面的加工难度与成本,除此之外物镜具有双远心结构,降低物镜对掩模面上微小的凹凸缺陷的灵敏度。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)