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1. (WO2019062911) VACUUM SUCTION MANIPULATOR, SUBSTRATE TRANSFER DEVICE, AND PHOTOETCHING MACHINE
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Pub. No.: WO/2019/062911 International Application No.: PCT/CN2018/108631
Publication Date: 04.04.2019 International Filing Date: 29.09.2018
IPC:
G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
上海微电子装备(集团)股份有限公司 SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO., LTD. [CN/CN]; 中国上海市 张江高科技园区张东路1525号 1525 Zhangdong Road, Zhangjiang High-Tech Park Shanghai 201203, CN
Inventors:
郑清泉 ZHENG, Qingquan; CN
Agent:
上海思微知识产权代理事务所(普通合伙) SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY; 中国上海市 黄浦区复兴中路1号申能国际大厦606-607室 Units 606-607, Shenergy International Building 1 Middle Fuxing Road, Huangpu District Shanghai 200021, CN
Priority Data:
201710944128.730.09.2017CN
Title (EN) VACUUM SUCTION MANIPULATOR, SUBSTRATE TRANSFER DEVICE, AND PHOTOETCHING MACHINE
(FR) MANIPULATEUR PAR ASPIRATION SOUS VIDE, DISPOSITIF DE TRANSFERT DE SUBSTRAT ET MACHINE DE PHOTOGRAVURE
(ZH) 真空吸附手、基底交接装置及光刻机
Abstract:
(EN) Provided is a vacuum suction manipulator, comprising a suction shaft (031), a suction head (07), a main body support (01), a driving assembly and an anti-rotation structure, wherein the suction shaft (031) is connected to the anti-rotation structure; the driving assembly is used for driving the suction shaft (031) and the anti-rotation structure to slide in an axial direction in the main body support (01); the anti-rotation structure is used for preventing the suction shaft (031) from rotating around the axial direction relative to the main body support (01); a top end of the suction shaft (031) is connected to the suction head (07); a vacuum channel is arranged in the suction shaft (031); and the suction head (07) is in communication with the vacuum channel. Further provided is a substrate transfer device comprising the vacuum suction manipulator, and a photoetching machine. The substrate transfer device improves the space utilization thereof and reduces the spatial size thereof. The present invention uses a circular gas suspension guide rail, is easily manufactured, and can easily satisfy the requirements for the manufacturing accuracy of a guide rail.
(FR) L'invention concerne un manipulateur par aspiration sous vide, comprenant un axe d'aspiration (031), une tête d'aspiration (07), un support de corps principal (01), un ensemble d'entraînement et une structure anti-rotation, dans lequel l'axe d'aspiration (031) est relié à la structure anti-rotation ; l'ensemble d'entraînement est utilisé pour entraîner l'axe d'aspiration (031) et la structure anti-rotation en coulissement dans une direction axiale dans le support de corps principal (01) ; la structure anti-rotation est utilisée pour empêcher l'axe d'aspiration (031) de tourner autour de la direction axiale par rapport au support de corps principal (01) ; une extrémité supérieure de l'axe d'aspiration (031) est reliée à la tête d'aspiration (07) ; un canal sous vide est agencé dans l'axe d'aspiration (031) ; et la tête d'aspiration (07) est en communication avec le canal sous vide. L'invention concerne en outre un dispositif de transfert de substrat comprenant le manipulateur par aspiration sous vide, et une machine de photogravure. Le dispositif de transfert de substrat améliore son utilisation de l'espace et réduit ses dimensions spatiales. La présente invention utilise un rail de guidage à suspension de gaz circulaire, est facile à fabriquer, et peut facilement satisfaire les exigences de la précision de fabrication d'un rail de guidage.
(ZH) 一种真空吸附手,包括吸附轴(031)、吸头(07)、主体支架(01)、驱动组件及防转结构,吸附轴(031)连接防转结构,驱动组件用于驱动吸附轴(031)和防转结构在主体支架(01)内沿轴向滑动,防转结构用于防止吸附轴(031)相对主体支架(01)绕轴向转动,吸附轴(031)顶端连接吸头(07),吸附轴(031)内设有真空通道,吸头(07)与真空通道连通。还提供了一种包括真空吸附手的基底交接装置以及光刻机。这种基底交接装置提高了自身空间利用率,降低了空间尺寸;采用圆形的气浮导轨,易于制造,容易满足导轨制造精度的要求。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)