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1. (WO2019062362) ELECTRO-ABSORPTION MODULATOR
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Pub. No.: WO/2019/062362 International Application No.: PCT/CN2018/100474
Publication Date: 04.04.2019 International Filing Date: 14.08.2018
IPC:
G02F 1/025 (2006.01) ,G02F 1/17 (2006.01)
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
015
based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
025
in an optical waveguide structure
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
17
based on variable absorption elements
Applicants:
HUAWEI TECHNOLOGIES CO., LTD. [CN/CN]; Huawei Administration Building, Bantian, Longgang District Shenzhen, Guangdong 518129, CN
IMEC VZW [BE/BE]; Kapeldreef 75, Heverlee 3001 Leuven, BE
Inventors:
CAI, Yan; DE
BAI, Yusheng; DE
VAN CAMPENHOUT, Joris; BE
Priority Data:
EP17194042.229.09.2017EP
Title (EN) ELECTRO-ABSORPTION MODULATOR
(FR) MODULATEUR ÉLECTROABSORBANT
Abstract:
(EN) An electro-absorption modulator (EAM) (100) and a fabrication method thereof are provided. The EAM (100) comprises a first conductivity type Si layer (101) and a second conductivity type Si layer (102). Further, it comprises a Ge layer (103) provided partly on the first conductivity type Si layer (101) and partly on the second conductivity type Si layer (102). The Ge layer (103) specifically includes an intrinsic lower region (104) and a second conductivity type upper region (105).
(FR) La présente invention se rapporte à un modulateur électroabsorbant (EAM) (100), et à un procédé de fabrication associé. L'EAM (100) comprend une couche de Si d'un premier type de conductivité (101), et une couche de Si d'un second type de conductivité (102). En outre, il comporte une couche de Ge (103) située en partie sur la couche de Si d'un premier type de conductivité (101) et en partie sur la couche de Si d'un second type de conductivité (102). La couche de Ge (103) inclut plus particulièrement une région inférieure intrinsèque (104) et une région supérieure d'un second type de conductivité (105).
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)