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1. (WO2019062116) VAPOR DEPOSITION MASK, OLED PANEL, SYSTEM, AND VAPOR DEPOSITION MONITORING METHOD
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Pub. No.: WO/2019/062116 International Application No.: PCT/CN2018/085015
Publication Date: 04.04.2019 International Filing Date: 28.04.2018
IPC:
H01L 51/56 (2006.01) ,C23C 14/04 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
56
Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
Applicants:
昆山国显光电有限公司 KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD. [CN/CN]; 中国江苏省昆山市 开发区龙腾路1号4幢 Building 4, No.1, Longteng Road, Development Zone Kunshan, Jiangsu 215300, CN
Inventors:
刘明星 LIU, Mingxing; CN
李俊峰 LI, Junfeng; CN
王徐亮 WANG, Xuliang; CN
高峰 GAO, Feng; CN
Agent:
上海思微知识产权代理事务所(普通合伙) SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY; 中国上海市 长宁区天山西路789号1幢341室 Room 341, Building 1 789 West Tianshan Road, Changning District Shanghai 200335, CN
Priority Data:
201710910812.329.09.2017CN
Title (EN) VAPOR DEPOSITION MASK, OLED PANEL, SYSTEM, AND VAPOR DEPOSITION MONITORING METHOD
(FR) MASQUE DE DÉPÔT EN PHASE VAPEUR, PANNEAU OLED, SYSTÈME, ET PROCÉDÉ DE SURVEILLANCE DE DÉPÔT EN PHASE VAPEUR
(ZH) 蒸镀掩膜板、OLED面板及系统及蒸镀监控方法
Abstract:
(EN) The present invention provides a vapor deposition mask, an OLED panel, a system, and a vapor deposition monitoring method. The vapor deposition mask comprises a first functional area and a first peripheral area located outside the first functional area. The first functional area has a first opening for forming a functional layer by means of vapor deposition, and the first peripheral area has a second opening for monitoring the vapor deposition effect of the first opening. By means of the second opening of the vapor deposition mask, a monitoring structure can be formed on an observation layer of an OLED panel by means of vapor deposition, and by means of the monitoring structure, the vapor deposition effect of the first opening of the vapor deposition mask can be monitored, so as to monitor the vapor deposition effect in a timely manner, thereby achieving a real-time online monitoring effect.
(FR) La présente invention concerne un masque de dépôt en phase vapeur, un panneau OLED, un système et un procédé de surveillance de dépôt en phase vapeur. Le masque de dépôt en phase vapeur comprend une première zone fonctionnelle et une première zone périphérique située à l'extérieur de la première zone fonctionnelle. La première zone fonctionnelle a une première ouverture pour former une couche fonctionnelle au moyen d'un dépôt en phase vapeur, et la première zone périphérique a une seconde ouverture pour surveiller l'effet de dépôt en phase vapeur de la première ouverture. Au moyen de la seconde ouverture du masque de dépôt en phase vapeur, une structure de surveillance peut être formée sur une couche d'observation d'un panneau OLED au moyen d'un dépôt en phase vapeur, et au moyen de la structure de surveillance, l'effet de dépôt en phase vapeur de la première ouverture du masque de dépôt en phase vapeur peut être surveillé, de façon à surveiller l'effet de dépôt en phase vapeur d'une manière opportune, ce qui permet d'obtenir un effet de surveillance en ligne en temps réel.
(ZH) 本发明提供了一种蒸镀掩膜板、OLED面板及系统及蒸镀监控方法,其中,所述蒸镀掩膜板包括第一功能区域和位于所述第一功能区域外的第一外围区域,所述第一功能区域具有用于蒸镀形成功能层的第一开口,所述第一外围区域具有用于监控所述第一开口的蒸镀效果的第二开口。通过蒸镀掩膜板的第二开口可以在OLED面板的观察层上蒸镀形成监控结构,通过所述监控结构可以监控所述蒸镀掩膜板的第一开口的蒸镀效果,从而可以及时的监控蒸镀效果,达到实时在线监控的效果。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)