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1. (WO2019061900) LITHIUM NIOBATE WAVEGUIDE HAVING HIGH POLARIZATION EXTINCTION RATIO AND MANUFACTURING METHOD THEREOF
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Pub. No.: WO/2019/061900 International Application No.: PCT/CN2017/118362
Publication Date: 04.04.2019 International Filing Date: 25.12.2017
IPC:
G02B 6/134 (2006.01) ,G02B 6/126 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10
of the optical waveguide type
12
of the integrated circuit kind
13
Integrated optical circuits characterised by the manufacturing method
134
by substitution by dopant atoms
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10
of the optical waveguide type
12
of the integrated circuit kind
126
using polarisation effects
Applicants:
武汉光迅科技股份有限公司 ACCELINK TECHNOLOGIES CO., LTD [CN/CN]; 中国湖北省武汉市 江夏区藏龙岛开发区潭湖路1号 1 Tanhu Road, Canglongdao Development Zone, Jiangxia District Wuhan, Hubei 430205, CN
Inventors:
杜闯 DU, Chuang; CN
王冲 WANG, Chong; CN
丁丽 DING, Li; CN
傅力 FU, Li; CN
陈小梅 CHEN, Xiaomei; CN
Agent:
北京天奇智新知识产权代理有限公司 BEIJING TIAN QI ZHI XIN INTELLECTUAL PROPERTY AGENCY CO., LTD; 中国北京市 海淀区蓟门里小区1幢316室(政法大厦) Room 316 Building 1 (Politics and Law Building), Ji Men Li, Hai Dian District Beijing 100088, CN
Priority Data:
201710909512.329.09.2017CN
Title (EN) LITHIUM NIOBATE WAVEGUIDE HAVING HIGH POLARIZATION EXTINCTION RATIO AND MANUFACTURING METHOD THEREOF
(FR) GUIDE D'ONDES AU NIOBATE DE LITHIUM AYANT UN RAPPORT D'EXTINCTION DE POLARISATION ÉLEVÉ ET SON PROCÉDÉ DE FABRICATION
(ZH) 一种高偏振消光比铌酸锂波导及其制作方法
Abstract:
(EN) A lithium niobate waveguide having a high polarization extinction ratio and a manufacturing method thereof. The method provides a protective layer on a bottom surface of a lithium niobate substrate (3) before proton exchange processing begins, so as to prevent proton exchange on the bottom surface of the lithium niobate substrate, wherein the bottom surface is a surface on which a waveguide has not been etched. The method prevents proton exchange from occurring on the bottom surface of a lithium niobate substrate, thereby preventing TM mode leakage or TE mode leakage coupling into an output optical fiber and increasing the TE/TM polarization extinction ratio of the lithium niobate waveguide.
(FR) Cette invention concerne également un guide d'ondes au niobate de lithium ayant un rapport d'extinction de polarisation élevé et son procédé de fabrication. Le procédé fournit une couche protectrice sur une surface inférieure d'un substrat de niobate de lithium (3) avant l'initiation d'un traitement par échange de protons, de manière à empêcher un échange de protons sur la surface inférieure du substrat de niobate de lithium, la surface inférieure étant une surface sur laquelle un guide d'ondes n'a pas été gravé. Le procédé empêche l'échange de protons de se produire sur la surface inférieure d'un substrat de niobate de lithium, de sorte à empêcher un couplage à fuite en mode transverse magnétique (TM) ou un couplage à fuite en mode transverse électrique (TE) dans une fibre optique de sortie et à accroître le rapport d'extinction de polarisation TE/TM du guide d'ondes au niobate de lithium.
(ZH) 一种高偏振消光比铌酸锂波导及其制作方法。该制作方法是在质子交换工艺前,在铌酸锂基片(3)下表面设置用于阻止下表面质子交换的保护层,下表面是未刻蚀波导的一面。该制造方法使得铌酸锂基片下表面无质子交换发生,降低TM漏模或TE漏模耦合进入输出光纤,提高铌酸锂波导的TE/TM偏振消光比。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)