Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2019061572) LOADING DEVICE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/061572 International Application No.: PCT/CN2017/106182
Publication Date: 04.04.2019 International Filing Date: 13.10.2017
IPC:
C23C 14/50 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
Applicants:
深圳市裕展精密科技有限公司 SHENZHENSHI YUZHAN PRECISION TECHNOLOGY CO., LTD. [CN/CN]; 中国广东省深圳市 观澜富士康鸿观科技园B区厂房5栋C09栋4层、C07栋2层、C08栋3层4层、C04栋1层 1F., Building CO4, 3F. and 4F., Building C08, 2F.,Building C07,4F., Building C09, Building B5 Foxconn Hongguan Science Park, Guanlan Shenzhen, Guangdong 518109, CN
Inventors:
董孝斌 DONG, Xiaobin; CN
沈世富 SHEN, Shifu; CN
徐娟 XU, Juan; CN
邵波 SHAO, Bo; CN
尹汪洋 YIN, Wangyang; CN
Agent:
深圳市赛恩倍吉知识产权代理有限公司 SHENZHEN SCIENBIZIP INTELLECTUAL PROPERTY AGENCY CO.,LTD.; 中国广东省深圳市 龙华新区龙观东路83号荣群大厦9楼 9F, Rongqun building NO.83 Longguan east Rd. Longhua new Dist. Shenzhen, Guangdong 518109, CN
Priority Data:
201721289694.030.09.2017CN
Title (EN) LOADING DEVICE
(FR) DISPOSITIF DE CHARGEMENT
(ZH) 装料装置
Abstract:
(EN) A loading device (1) used for loading a workpiece (2) to be treated with PVD. The loading device (1) comprises an upper cover (10) and a lower cover (20). The upper cover (10) comprises an upper cover body (11). The lower cover (20) comprises a lower cover body (21). The workpiece (2) is sandwiched between the upper cover body (11) and the lower cover body (21). The upper cover (10) further comprises a conductive elastic piece (16) mounted on the upper cover body (11). The conductive elastic piece (16) is in contact with the workpiece (2). The loading device (1) further comprises a fastening member (30). The upper cover body (11) is provided with an upper engaging hole (18), and the lower cover body (21) is provided with a lower engaging hole (28). The fastening member (30) engages with the upper engaging hole (18) and the lower engaging hole (28) to cause the upper cover (10) to engage with the lower cover (20).
(FR) Un dispositif de chargement (1) utilisé pour charger une pièce (2) devant être traitée par dépôt physique en phase vapeur (PVD). Le dispositif de chargement (1) comprend un couvercle supérieur (10) et un couvercle inférieur (20). Le couvercle supérieur (10) comprend un corps de couvercle supérieur (11). Le couvercle inférieur (20) comprend un corps de couvercle inférieur (21). La pièce (2) est prise en étau entre le corps de couvercle supérieur (11) et le corps de couvercle inférieur (21). Le couvercle supérieur (10) comprend en outre une pièce élastique conductrice (16) montée sur le corps de couvercle supérieur (11). La pièce élastique conductrice (16) est en contact avec la pièce (2). Le dispositif de chargement (1) comprend en outre un élément de fixation (30). Le corps de couvercle supérieur (11) est pourvu d'un trou de mise en prise supérieur (18), et le corps de couvercle inférieur (21) est pourvu d'un trou de mise en prise inférieur (28). L'élément de fixation (30) vient en prise avec le trou de mise en prise supérieur (18) et le trou de mise en prise inférieur (28) pour amener le couvercle supérieur (10) à venir en prise avec le couvercle inférieur (20).
(ZH) 一种装料装置(1),用以装载一待PVD处理的工件(2),所述装料装置(1)包括上盖(10)及下盖(20),所述上盖(10)包括上盖体(11),所述下盖(20)包括下盖体(21),所述上盖体(11)及所述下盖体(21)将所述工件(2)装夹在两者之间,所述上盖(10)还包括有安装在所述上盖体(11)上的导电弹片(16),所述导电弹片(16)接触所述工件(2),所述装料装置(1)还包括有卡扣件(30),所述上盖体(11)设有上卡孔(18),所述下盖体(21)设有下卡孔(28),所述卡扣件(30)卡入所述上卡孔(18)及下卡孔(28)中将所述上盖(10)与所述下盖(20)卡扣在一起。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)