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1. WO2019060177 - WAFER LEVEL SEQUENCING FLOW CELL FABRICATION

Publication Number WO/2019/060177
Publication Date 28.03.2019
International Application No. PCT/US2018/050437
International Filing Date 11.09.2018
IPC
H01L 21/02 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
H01L 21/70 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
H01L 31/02 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
C12Q 1/68 2018.01
CCHEMISTRY; METALLURGY
12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
1Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
68involving nucleic acids
B81B 1/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
1Devices without movable or flexible elements, e.g. microcapillary devices
B01L 3/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
CPC
B01J 19/0046
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19Chemical, physical or physico-chemical processes in general; Their relevant apparatus
0046Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
B01J 2219/00619
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
2219Chemical, physical or physico-chemical processes in general; Their relevant apparatus
00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
00583Features relative to the processes being carried out
00603Making arrays on substantially continuous surfaces
00605the compounds being directly bound or immobilised to solid supports
00614Delimitation of the attachment areas
00617by chemical means
00619using hydrophilic or hydrophobic regions
B01L 2300/0663
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
06Auxiliary integrated devices, integrated components
0627Sensor or part of a sensor is integrated
0663Whole sensors
B01L 2300/0816
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
08Geometry, shape and general structure
0809rectangular shaped
0816Cards, e.g. flat sample carriers usually with flow in two horizontal directions
B01L 2300/0861
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
08Geometry, shape and general structure
0861Configuration of multiple channels and/or chambers in a single devices
B01L 2300/0877
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
08Geometry, shape and general structure
0861Configuration of multiple channels and/or chambers in a single devices
0877Flow chambers
Applicants
  • MGI TECH CO., LTD. [CN]/[CN]
Inventors
  • LI, Shifeng
  • GONG, Jian
  • LIN, Yan-You
  • ZHONG, Cheng Frank
Agents
  • KAO, Dah-Bin
  • APPLE, Randolph T.
Priority Data
62/560,58519.09.2017US
62/669,89010.05.2018US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) WAFER LEVEL SEQUENCING FLOW CELL FABRICATION
(FR) FABRICATION DE CELLULES DE FLUX DE SÉQUENÇAGE AU NIVEAU DE LA TRANCHE
Abstract
(EN)
A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.
(FR)
La présente invention concerne un procédé de formation de cellules de flux de séquençage qui peut consister à fournir une tranche semi-conductrice recouverte d'une couche diélectrique, et à former une couche à motifs sur la couche diélectrique. La couche à motifs comporte une surface différentielle comprenant des premières régions de surface et des secondes régions de surface alternées. Le procédé peut également consister à fixer une tranche de couverture à la tranche semi-conductrice de manière à former une structure de tranche composite comprenant une pluralité de cellules de flux. La structure de tranche composite peut ensuite être séparée pour former une pluralité de puces. Chaque puce forme une cellule de flux de séquençage. La cellule de flux de séquençage peut comprendre un canal de flux entre une partie de la couche à motifs et une partie de la tranche de couverture, une entrée et une sortie. En outre, le procédé peut consister à fonctionnaliser la cellule de flux de séquençage afin de créer des surfaces différentielles.
Also published as
JP2020511303
Latest bibliographic data on file with the International Bureau