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1. WO2019057360 - ACTIVE AEROSTATIC BEARING

Publication Number WO/2019/057360
Publication Date 28.03.2019
International Application No. PCT/EP2018/068064
International Filing Date 04.07.2018
IPC
F16C 32/06 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; MECHANICAL MEANS FOR TRANSMITTING MOVEMENT IN A FLEXIBLE SHEATHING; ELEMENTS OF CRANKSHAFT MECHANISMS; PIVOTS; PIVOTAL CONNECTIONS; ROTARY ENGINEERING ELEMENTS OTHER THAN GEARING, COUPLING, CLUTCH OR BRAKE ELEMENTS; BEARINGS
32Bearings not otherwise provided for
06with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
CPC
F16C 2380/18
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
2380Electrical apparatus
18Handling tools for semiconductor devices
F16C 29/025
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
29Bearings for parts moving only linearly
02Sliding-contact bearings
025Hydrostatic or aerostatic
F16C 32/0607
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
32Bearings not otherwise provided for
06with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
0603supported by a gas cushion, e.g. an air cushion
0607the gas being retained in a gap, e.g. squeeze film bearings
F16C 32/0622
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
32Bearings not otherwise provided for
06with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
0603supported by a gas cushion, e.g. an air cushion
0614the gas being supplied under pressure, e.g. aerostatic bearings
0622via nozzles, restrictors
F16C 32/0674
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
32Bearings not otherwise provided for
06with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
0662Details of hydrostatic bearings independent of fluid supply or direction of load
067of bearings adjustable for aligning, positioning, wear or play
0674by means of pre-load on the fluid bearings
Applicants
  • ETEL S.A. [CH]/[CH]
Inventors
  • MAAMARI, Nadim
Agents
  • PLEYER, Hans
Priority Data
17192381.621.09.2017EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(DE) ACTIVE AEROSTATIC BEARING
(EN) ACTIVE AEROSTATIC BEARING
(FR) PALIER AÉROSTATIQUE ACTIF
Abstract
(DE)
- 12 - ABSTRACT Active Aerostatic Bearing =================== An active aerostatic bearing is described, comprising a lower plate (1) with a central recess area (R) including an orifice (O) forming an inlet restrictor for pressurized air from a central nozzle (N). An air gap is formed between a guiding surface (S) and the lower plate (1). The active aerostatic bearing comprises a force actuator (VC, M, 11) acting to deform the lower plate (1) 5 and thus changing the shape of the air gap. The actuator (VC, M, 11) causes a conical deformation of the first plate (1). Preferably, the first plate (1), a second plate (2) and four pivoting points (P1, P2, P3, P4) are forming a parallelogram, the shape of the parallelogram being changeable by actuating the actuator (VC, M, 11).10 (Fig. 4)
(EN)
An active aerostatic bearing is described, comprising a lower plate (1) with a central recess area (R) including an orifice (O) forming an inlet restrictor for pressurized air from a central nozzle (N). An air gap is formed between a guiding surface (S) and the lower plate. The active aerostatic bearing comprises a force actuator (VC, M) acting to deform the lower plate and thus changing the shape of the air gap. The actuator causes a conical deformation of the first plate. Preferably, the first plate, a second plate (2) and four pivoting points (P1, P2, P3, P4) are forming a parallelogram, the shape of the parallelogram being changeable by actuating the actuator.
(FR)
La présente invention concerne un palier aérostatique actif, comprenant une plaque inférieure (1) avec une zone d’évidement centrale (R) comprenant un orifice (O) formant un étranglement d’entrée pour de l’air sous pression provenant d’une buse centrale (N). Un espacement d’air est formé entre une surface de guidage (S) et la plaque inférieure. Le palier aérostatique actif comprend un actionneur de force (VC, M) agissant de façon à déformer la plaque inférieure et modifier ainsi la forme de l’espacement d’air. L’actionneur provoque une déformation conique de la première plaque. De préférence, la première plaque, une deuxième plaque (2) et quatre points de pivotement (P1, P2, P3, P4) forment un parallélogramme, la forme du parallélogramme pouvant être modifiée par actionnement de l’actionneur.
Also published as
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