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1. WO2019057310 - SYSTEM FOR CLEANING A VACUUM CHAMBER, METHOD FOR CLEANING A VACUUM CHAMBER AND USE OF A COMPRESSOR FOR CLEANING A VACUUM CHAMBER

Publication Number WO/2019/057310
Publication Date 28.03.2019
International Application No. PCT/EP2017/074205
International Filing Date 25.09.2017
IPC
C23C 14/56 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C23C 16/44 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44characterised by the method of coating
B08B 5/02 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
5Cleaning by methods involving the use of air flow or gas flow
02Cleaning by the force of jets, e.g. blowing-out cavities
H01J 37/32 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
CPC
B08B 5/00
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
5Cleaning by methods involving the use of air flow or gas flow
B08B 7/0021
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
7Cleaning by methods not provided for in a single other subclass or a single group in this subclass
0021by liquid gases or supercritical fluids
B08B 9/0321
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
9Cleaning hollow articles by methods or apparatus specially adapted thereto
02Cleaning pipes or tubes or systems of pipes or tubes
027Cleaning the internal surfaces; Removal of blockages
032by the mechanical action of a moving fluid, e.g. by flushing
0321using pressurised, pulsating or purging fluid
B08B 9/0328
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
9Cleaning hollow articles by methods or apparatus specially adapted thereto
02Cleaning pipes or tubes or systems of pipes or tubes
027Cleaning the internal surfaces; Removal of blockages
032by the mechanical action of a moving fluid, e.g. by flushing
0321using pressurised, pulsating or purging fluid
0328by purging the pipe with a gas or a mixture of gas and liquid
C23C 14/564
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
C23C 16/4407
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
4401Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
4407Cleaning of reactor or reactor parts by using wet or mechanical methods
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
  • GEBELE, Thomas [DE]/[DE] (US)
  • BUSCHBECK, Wolfgang [DE]/[DE] (US)
  • HAAS, Dieter [DE]/[US] (US)
Inventors
  • GEBELE, Thomas
  • BUSCHBECK, Wolfgang
  • HAAS, Dieter
Agents
  • ZIMMERMANN & PARTNER PATENTANWÄLTE MBB
Priority Data
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) SYSTEM FOR CLEANING A VACUUM CHAMBER, METHOD FOR CLEANING A VACUUM CHAMBER AND USE OF A COMPRESSOR FOR CLEANING A VACUUM CHAMBER
(FR) SYSTÈME DE NETTOYAGE D'UNE CHAMBRE À VIDE, PROCÉDÉ DE NETTOYAGE D'UNE CHAMBRE À VIDE ET UTILISATION D'UN COMPRESSEUR POUR NETTOYER UNE CHAMBRE À VIDE
Abstract
(EN) The present disclosure relates to a system for cleaning a vacuum chamber. The system includes a vacuum chamber and a compressor. The vacuum chamber includes an inlet and an outlet. The compressor includes an inlet side connected to the outlet and an outlet side connected to the inlet.
(FR) La présente invention concerne un système de nettoyage d'une chambre à vide. Le système comprend une chambre à vide et un compresseur. La chambre à vide comprend une entrée et une sortie. Le compresseur comprend un côté d'entrée relié à la sortie et un côté de sortie relié à l'entrée.
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