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1. WO2019055467 - RF RESONATOR FOR ION BEAM ACCELERATION

Publication Number WO/2019/055467
Publication Date 21.03.2019
International Application No. PCT/US2018/050587
International Filing Date 12.09.2018
IPC
H01J 37/248 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
248Components associated with high voltage supply
H01J 37/317 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
317for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
H01J 5/34 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
5Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
32Seals for leading-in conductors
34for an individual conductor
H01J 5/56 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
5Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
50Means forming part of the tube or lamp for the purpose of providing electrical connection to it
54supported by a separate part, e.g. base
56Shape of the separate part
CPC
C23C 14/48
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
48Ion implantation
H01J 2237/022
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
02Details
022Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
H01J 2237/0473
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
04Means for controlling the discharge
047Changing particle velocity
0473accelerating
H01J 37/24
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
H01J 37/248
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
248Components associated with high voltage supply
H01J 37/3171
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
317for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
3171for ion implantation
Applicants
  • AXCELIS TECHNOLOGIES, INC. [US]/[US]
Inventors
  • SATOH, Shu
Priority Data
62/559,10315.09.2017US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) RF RESONATOR FOR ION BEAM ACCELERATION
(FR) RÉSONATEUR RF POUR ACCÉLÉRATION DE FAISCEAU IONIQUE
Abstract
(EN)
An RF feedthrough has an electrically insulative cone that is hollow having first and second openings at first and second ends having first and second diameters. The first diameter is larger than the second diameter, defining a tapered sidewall of the cone to an inflection point. A stem is coupled to the second end of the cone, and passes through the first opening and second opening. A flange is coupled to the first end of the cone and has a flange opening having a third diameter. The third diameter is smaller than the first diameter. The stem passes through the flange opening without contacting the flange. The flange couples the cone to a chamber wall hole. Contact portions of the cone may be metallized. The cone and flange pass the stem through the hole while electrically insulating the stem from the wall of the chamber.
(FR)
L'invention concerne une traversée RF ayant un cône électroisolant qui est creux ayant des première et seconde ouvertures à des première et seconde extrémités ayant des premier et second diamètres. Le premier diamètre est supérieur au second diamètre, définissant une paroi latérale effilée du cône vers un point d'inflexion. Une tige est couplée à la seconde extrémité du cône, et passe à travers la première ouverture et la seconde ouverture. Une bride est couplée à la première extrémité du cône et a une ouverture de bride ayant un troisième diamètre. Le troisième diamètre est inférieur au premier diamètre. La tige passe à travers l'ouverture de bride sans entrer en contact avec la bride. La bride couple le cône à un trou de paroi de chambre. Des parties de contact du cône peuvent être métallisées. Le cône et la bride font passer la tige à travers le trou tout en isolant électriquement la tige de la paroi de la chambre.
Also published as
JP2020512718
Latest bibliographic data on file with the International Bureau