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1. WO2019054550 - CHALCOGENIDE SOLAR CELL HAVING TRANSPARENT CONDUCTIVE OXIDE BACK ELECTRODE, AND MANUFACTURING METHOD THEREFOR

Publication Number WO/2019/054550
Publication Date 21.03.2019
International Application No. PCT/KR2017/011586
International Filing Date 19.10.2017
IPC
H01L 31/032 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
0248characterised by their semiconductor bodies
0256characterised by the material
0264Inorganic materials
032including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272-H01L31/0312154
H01L 31/0224 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
0224Electrodes
H01L 31/0304 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
0248characterised by their semiconductor bodies
0256characterised by the material
0264Inorganic materials
0304including, apart from doping materials or other impurities, only AIIIBV compounds
H01L 31/0392 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
0248characterised by their semiconductor bodies
036characterised by their crystalline structure or particular orientation of the crystalline planes
0392including thin films deposited on metallic or insulating substrates
H01L 31/18 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
CPC
H01L 31/022441
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
0224Electrodes
022408for devices characterised by at least one potential jump barrier or surface barrier
022425for solar cells
022441Electrode arrangements specially adapted for back-contact solar cells
H01L 31/022466
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
0224Electrodes
022466made of transparent conductive layers, e.g. TCO, ITO layers
H01L 31/03046
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
0248characterised by their semiconductor bodies
0256characterised by the material
0264Inorganic materials
0304including, apart from doping materials or other impurities, only AIIIBV compounds
03046including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
H01L 31/0324
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
0248characterised by their semiconductor bodies
0256characterised by the material
0264Inorganic materials
032including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
0324comprising only AIVBVI or AIIBIVCVI chalcogenide compounds, e.g. Pb Sn Te
H01L 31/03923
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
0248characterised by their semiconductor bodies
036characterised by their crystalline structure or particular orientation of the crystalline planes
0392including thin films deposited on metallic or insulating substrates ; ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
03923including AIBIIICVI compound materials, e.g. CIS, CIGS
H01L 31/18
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
18Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
Applicants
  • 한국과학기술연구원 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY [KR]/[KR]
Inventors
  • 정증현 JEONG, Jeung Hyun
  • 김원목 KIM, Won Mok
  • 박종극 PARK, Jong Keuk
Agents
  • 이인행 LEE, In Haeng
  • 김남식 KIM, Nam Sik
  • 김한 KIM, Han
Priority Data
10-2017-011805814.09.2017KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) CHALCOGENIDE SOLAR CELL HAVING TRANSPARENT CONDUCTIVE OXIDE BACK ELECTRODE, AND MANUFACTURING METHOD THEREFOR
(FR) CELLULE SOLAIRE EN CHALCOGÉNURE AYANT UNE ÉLECTRODE ARRIÈRE EN OXYDE CONDUCTEUR TRANSPARENT, ET SON PROCÉDÉ DE FABRICATION
(KO) 투명 전도성 산화물 후면전극을 가지는 칼코게나이드계 태양전지 및 그 제조방법
Abstract
(EN)
According to one aspect of the present invention, provided is a chalcogenide solar cell comprising: a substrate; a transparent conductive oxide back electrode formed on the substrate; a chalcogenide light-absorbing layer formed on the transparent conductive oxide back electrode, and comprising at least Cu, Ga and Ag; and a transparent conductive oxide front electrode formed on the chalcogenide light-absorbing layer, wherein a Cu-excess region, in which a Cu content is relatively higher than the average Cu content of the chalcogenide light-absorbing layer, is formed in the interface region at which the chalcogenide light-absorbing layer comes in contact with the transparent conductive oxide back electrode.
(FR)
L'invention concerne, selon un aspect, une cellule solaire en chalcogénure comprenant : un substrat ; une électrode arrière en oxyde conducteur transparent formée sur le substrat ; une couche d'absorption de lumière en chalcogénure formée sur l'électrode arrière en oxyde conducteur transparent, et comprenant au moins Cu, Ga et Ag ; et une électrode avant en oxyde conducteur transparent formée sur la couche d'absorption de lumière de chalcogénure, une région en excès de Cu, dans laquelle une teneur en Cu est relativement supérieure à la teneur en Cu moyenne de la couche d'absorption de lumière de chalcogénure, est formée dans la région d'interface au niveau de laquelle la couche d'absorption de lumière en chalcogénure vient en contact avec l'électrode arrière en oxyde conducteur transparent.
(KO)
본 발명의 일관점에 따르면 기판; 상기 기판 상부에 형성된 투명 전도성 산화물 후면전극; 상기 투명 전도성 산화물 후면전극의 상부에 형성된 적어도 Cu, Ga 및 Ag을 포함하는 칼코게나이드계 광흡수층; 및 상기 칼코게나이드계 광흡수층 상부에 형성된 투명 전도성 산화물 전면전극을 포함하며, 상기 칼코게나이드계 광흡수층이 상기 투명 전도성 산화물 후면전극에 접하는 계면영역에는 Cu의 함량이 상기 칼코게나이드계 광흡수층의 평균 Cu 함량에 비해 상대적으로 높은 Cu-과잉영역이 형성되어 있는 것을 특징으로 하는, 칼코게나이드계 태양전지가 제공된다.
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