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1. (WO2019050659) HIGH QUALITY FACTOR MEMS SILICON HINGE AND SLOT-CUT RESONATOR FOR A VIBRATORY GYROSCOPE
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Pub. No.: WO/2019/050659 International Application No.: PCT/US2018/046559
Publication Date: 14.03.2019 International Filing Date: 13.08.2018
IPC:
G01C 19/5684 (2012.01) ,G01M 7/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
567
using the phase shift of a vibration node or antinode
5677
of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
5684
the devices involving a micro-mechanical structure
G PHYSICS
01
MEASURING; TESTING
M
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
7
Vibration-testing of structures; Shock-testing of structures
02
Vibration-testing
Applicants:
HRL LABORATORIES, LLC [US/US]; 3011 Malibu Canyon Road Malibu, California 90265-4799, US
Inventors:
HUANG, Lian X.; US
SORENSON, Logan D.; US
CHANG, Chia-ming "Gavin"; US
PERAHIA, Raviv; US
NGUYEN, Hung; US
CHANG, David T.; US
Agent:
LUSINCHI, Laurent P.; US
BERG, Richard P.; US
TOWER, Lee W.; US
GALLENSON, Mavis S.; US
KOBZEFF, Joseph M.; US
Priority Data:
62/555,61707.09.2017US
Title (EN) HIGH QUALITY FACTOR MEMS SILICON HINGE AND SLOT-CUT RESONATOR FOR A VIBRATORY GYROSCOPE
(FR) CHARNIÈRE EN SILICIUM MEMS À FACTEUR DE QUALITÉ ÉLEVÉ ET RÉSONATEUR À FENTE COUPÉE POUR GYROSCOPE VIBRANT
Abstract:
(EN) A resonant structure comprising at least two coaxial rings, wherein adjacent coaxial rings have adjacent peripheries and are attached together by a plurality of connection structures regularly arranged along said adjacent peripheries; and wherein a first ring has a first ring portion with a first radial thickness and a second ring portion, in a vicinity of a first connection structure, with a second radial thickness smaller than said first radial thickness.
(FR) La présente invention concerne une structure résonante qui comprend au moins deux anneaux coaxiaux, des anneaux coaxiaux adjacents ayant des périphéries adjacentes et étant fixés conjointement par une pluralité de structures de raccordement agencées de façon régulière le long desdites périphéries adjacentes ; et un premier anneau ayant une première partie annulaire avec une première épaisseur radiale et une deuxième partie annulaire, à proximité d’une première structure de raccordement, ayant une deuxième épaisseur radiale inférieure à ladite première épaisseur radiale.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)