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1. (WO2019050517) SUBSTRATE-DECOUPLED HIGH-CORIOLIS-COUPLING PITCH/ROLL GYROSCOPE
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Pub. No.: WO/2019/050517 International Application No.: PCT/US2017/050442
Publication Date: 14.03.2019 International Filing Date: 07.09.2017
IPC:
B81B 3/00 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Applicants:
GEORGIA TECH RESEARCH CORPORATION [US/US]; Georgia Institute of Technology 505 Tenth Street, NW Atlanta, Georgia 30332-0415, US
Inventors:
WEN, Haoran; US
AYAZI, Farrokh; US
Agent:
MYERS BIGEL, PA; PO Box 37428 Raleigh, North Carolina 27627, US
Priority Data:
Title (EN) SUBSTRATE-DECOUPLED HIGH-CORIOLIS-COUPLING PITCH/ROLL GYROSCOPE
(FR) GYROSCOPE À TANGAGE/ROULIS À COUPLAGE DE CORIOLIS ÉLEVÉ DÉCOUPLÉ DU SUBSTRAT
Abstract:
(EN) A microelectromechanical resonator includes a resonator member suspended over a surface of a substrate by at least one anchor that is connected to the substrate. The resonator member includes outer and inner frames that are concentrically arranged and mechanically coupled by support structures extending therebetween. Related apparatus and gyroscopes are also discussed.
(FR) L'invention concerne un résonateur microélectromécanique comprenant un élément résonateur suspendu sur une surface d'un substrat par au moins un ancrage qui est relié au substrat. L'élément résonateur comprend des cadres externe et interne qui sont agencés de manière concentrique et couplés mécaniquement par des structures de support s'étendant entre ceux-ci. L'invention concerne également un appareil et des gyroscopes associés.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)