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1. (WO2019050246) PULSE LASER DEPOSITION EQUIPMENT COMPRISING VACUUM CHAMBER
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/050246 International Application No.: PCT/KR2018/010270
Publication Date: 14.03.2019 International Filing Date: 04.09.2018
IPC:
C23C 14/34 (2006.01) ,C23C 14/52 (2006.01) ,C23C 14/54 (2006.01) ,C23C 14/56 (2006.01) ,C23C 14/58 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
52
Means for observation of the coating process
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
54
Controlling or regulating the coating process
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
56
Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
58
After-treatment
Applicants:
한국 천문 연구원 KOREA ASTRONOMY AND SPACE SCIENCE INSTITUTE [KR/KR]; 대전시 유성구 대덕대로 776 776, Daedeokdae-ro, Yuseong-gu, Daejeon 34055, KR
Inventors:
이대희 LEE, Dae Hee; KR
강용우 KANG, Yong Woo; KR
문봉곤 MOON, Bong Kon; KR
박영식 PARK, Young Sik; KR
박원기 PARK, Won Kee; KR
방승철 BANG, Seung Chul; KR
Agent:
김정수 KIM, Jung Su; KR
Priority Data:
10-2017-011340105.09.2017KR
Title (EN) PULSE LASER DEPOSITION EQUIPMENT COMPRISING VACUUM CHAMBER
(FR) ÉQUIPEMENT DE DÉPÔT PAR LASER À IMPULSIONS COMPRENANT UNE CHAMBRE À VIDE
(KO) 진공챔버를 포함하는 펄스 레이저 증착 설비
Abstract:
(EN) The present invention is characterized by comprising: a base plate having a first view port formed therein; a vacuum chamber disposed on the base plate, maintained in a sealed state from the outside, and having a second view port formed at the upper end thereof and opposite to the first view port; at least one flange disposed on one side of the vacuum chamber and structured to communicate with the inside of the vacuum chamber; a laser generator disposed outside the vacuum chamber so as to generate a laser beam which passes through the first view port and is radiated into the vacuum chamber; and a carousel assembly which is disposed in the vacuum chamber and to which a substrate and a deposition target to be deposited on the substrate are mounted.
(FR) La présente invention est caractérisée en ce qu'elle comprend : une plaque de base dans laquelle est formé un premier orifice de visualisation ; une chambre à vide disposée sur la plaque de base, maintenue dans un état étanche depuis l'extérieur, et à l'extrémité supérieure de laquelle est formé un second orifice de visualisation, opposé au premier orifice de visualisation ; au moins une bride disposée sur un côté de la chambre à vide et conçue de manière à communiquer avec l'intérieur de la chambre à vide ; un générateur laser disposé à l'extérieur de la chambre à vide, de façon à générer un faisceau laser qui passe à travers le premier orifice de visualisation et qui est irradié dans la chambre à vide ; et un ensemble carrousel qui est disposé dans la chambre à vide et sur lequel sont montés un substrat et une cible de dépôt à déposer sur le substrat.
(KO) 본 발명은 제 1 뷰포트(view port)가 형성되는 베이스 플레이트; 상기 베이스 플레이트의 상부에 설치되어 외부로부터 밀폐된 상태를 유지하고, 상단에는 상기 제 1 뷰포트와 마주보도록 제 2 뷰포트가 형성되는 진공챔버(vacuum chamber); 상기 진공챔버의 일측에 설치되어 진공챔버의 내부와 연통되는 구조로 형성되는 적어도 하나 이상의 플랜지(flange); 상기 진공챔버의 외부에 설치되어 상기 제 1 뷰포트를 통과하여 진공챔버의 내부로 조사되는 레이저를 발생시키는 레이저 발생장치; 및 상기 진공챔버의 내부에 설치되며, 기판 및 상기 기판에 증착되는 증착 타겟이 장착되는 캐로셀 어셈블리(carousel assembly)를 포함하는 것을 특징으로 한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)