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1. (WO2019049518) STORAGE SYSTEM AND PURGE METHOD IN STORAGE SYSTEM
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/049518 International Application No.: PCT/JP2018/027043
Publication Date: 14.03.2019 International Filing Date: 19.07.2018
IPC:
H01L 21/677 (2006.01) ,B65G 1/00 (2006.01) ,B65G 1/137 (2006.01) ,H01L 21/673 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
1
Storing articles, individually or in orderly arrangement, in warehouses or magazines
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
1
Storing articles, individually or in orderly arrangement, in warehouses or magazines
02
Storage devices
04
mechanical
137
with arrangements or automatic control means for selecting which articles are to be removed
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
Applicants:
村田機械株式会社 MURATA MACHINERY, LTD. [JP/JP]; 京都府京都市南区吉祥院南落合町3番地 3, Minami Ochiai-cho, Kisshoin, Minami-ku, Kyoto-shi, Kyoto 6018326, JP
Inventors:
椿 達雄 TSUBAKI Tatsuo; JP
山路 孝 YAMAJI Takashi; JP
Agent:
塩入 明 SHIOIRI Akira; JP
塩入 みか SHIOIRI Mika; JP
Priority Data:
2017-17288808.09.2017JP
Title (EN) STORAGE SYSTEM AND PURGE METHOD IN STORAGE SYSTEM
(FR) SYSTÈME DE STOCKAGE ET PROCÉDÉ DE PURGE DANS UN SYSTÈME DE STOCKAGE
(JA) 保管システムと保管システムでのパージ方法
Abstract:
(EN) A storage system according to the present invention is provided with: a plurality of shelves each provided with a nozzle for supplying a clean gas; a plurality of flow-volume control parts for controlling the supply volume of the clean gas; a transport device for delivering/receiving containers to/from the shelves; and a controller for controlling the transport device and the flow-volume control parts. By means of the controller, before the occurrence of a container scheduled to be stored, at least one shelf is preliminarily reserved in preparation for storing the container, and a clean gas is supplied from the flow-volume control part to the nozzle of the at least one shelf on the basis of the result of this reservation.
(FR) Un système de stockage selon la présente invention comprend : une pluralité d'étagères comportant chacune une buse permettant de fournir un gaz propre ; une pluralité de parties de commande de débit-volume permettant de commander le volume de distribution du gaz propre ; un dispositif de transport permettant de distribuer/recevoir des contenants vers/à partir des étagères ; et un dispositif de commande permettant de commander le dispositif de transport et les parties de commande de débit-volume. Au moyen du dispositif de commande, avant l'apparition d'un contenant programmé devant être stocké, au moins une étagère est préalablement réservée dans la préparation pour stocker le contenant, et un gaz propre est distribué de la partie de commande de débit-volume à la buse de ladite étagère sur la base du résultat de cette réservation.
(JA) 保管システムは、クリーンガスを供給するノズルが設けられた複数の棚と、クリーンガスの供給量を制御する複数の流量制御部と、棚に容器を搬出入する搬送装置と、搬送装置と流量制御部とを制御するコントローラとを備えている。コントローラにより、保管予定の容器の発生前に、容器の保管に備えて少なくとも1個の棚を予め引き当てると共に、この引き当て結果に基づいて、流量制御部から少なくとも1個の棚のノズルへクリーンガスを供給する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)