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1. (WO2019048737) OVEN-CONTROLLED FREQUENCY REFERENCE OSCILLATOR AND METHOD OF FABRICATING THEREOF
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/048737 International Application No.: PCT/FI2018/050627
Publication Date: 14.03.2019 International Filing Date: 05.09.2018
IPC:
H03H 9/02 (2006.01) ,B81B 3/00 (2006.01) ,H01L 41/08 (2006.01) ,H03H 3/007 (2006.01) ,H03L 1/02 (2006.01) ,H03L 1/04 (2006.01) ,H03L 7/06 (2006.01) ,H03L 7/083 (2006.01)
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02
Details
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08
Piezo-electric or electrostrictive elements
[IPC code unknown for H03H 3/07]
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
L
AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
1
Stabilisation of generator output against variations of physical values, e.g. power supply
02
against variations of temperature only
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
L
AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
1
Stabilisation of generator output against variations of physical values, e.g. power supply
02
against variations of temperature only
04
Constructional details for maintaining temperature constant
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
L
AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
7
Automatic control of frequency or phase; Synchronisation
06
using a reference signal applied to a frequency- or phase-locked loop
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
L
AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
7
Automatic control of frequency or phase; Synchronisation
06
using a reference signal applied to a frequency- or phase-locked loop
08
Details of the phase-locked loop
083
the reference signal being additionally directly applied to the generator
Applicants:
TIKITIN OY [FI/FI]; Tietotie 3 02150 Espoo, FI
Inventors:
OJA, Aarne; FI
JAAKKOLA, Antti; FI
Agent:
ESPATENT OY; Kaivokatu 10 D 00100 Helsinki, FI
Priority Data:
2017579205.09.2017FI
Title (EN) OVEN-CONTROLLED FREQUENCY REFERENCE OSCILLATOR AND METHOD OF FABRICATING THEREOF
(FR) OSCILLATEUR DE RÉFÉRENCE DE FRÉQUENCE À ENCEINTE À TEMPÉRATURE RÉGULÉE ET SON PROCÉDÉ DE FABRICATION
Abstract:
(EN) The invention relates to a temperature-compensated microelectromechanical oscillator and a method of fabricating thereof. The oscillator comprises a resonator element comprising highly doped silicon and an actuator for exciting the resonator body into a resonance mode having a characteristic frequency-vs-temperature curve. The properties of the resonator element and the actuator are chosen such that the curve has a high-temperature turnover point at a turnover temperature of 85C or more. In addition, the oscillator comprises a thermostatic controller for keeping the temperature of the resonator element at said high turnover temperature.
(FR) L'invention concerne un oscillateur microélectromécanique à compensation thermique et son procédé de fabrication. L'oscillateur comprend un élément résonateur comprenant du silicium fortement dopé et un actionneur permettant d'exciter le corps de résonateur en un mode de résonance ayant une courbe fréquence-température caractéristique. Les propriétés de l'élément résonateur et de l'actionneur sont choisies de telle sorte que la courbe comporte un point de retournement à température élevée à une température de retournement supérieure ou égale à 85 °C. De plus, l'oscillateur comprend un dispositif de régulation thermostatique permettant de maintenir la température de l'élément résonateur à ladite température de retournement élevée.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)