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1. (WO2019048497) ION BEAM GENERATOR WITH NANOWIRES
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Pub. No.: WO/2019/048497 International Application No.: PCT/EP2018/073897
Publication Date: 14.03.2019 International Filing Date: 05.09.2018
IPC:
H01J 27/26 (2006.01) ,F03H 1/00 (2006.01) ,H01J 37/08 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
27
Ion beam tubes
02
Ion sources; Ion guns
26
using surface ionisation, e.g. field effect ion sources, thermionic ion sources
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
03
MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
H
PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
1
Use of plasma to produce a reactive propulsive thrust
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
04
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
08
Ion sources; Ion guns
Applicants:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE [FR/FR]; 3, rue Michel Ange 75016 Paris, FR
Inventors:
GIERAK, Jacques; FR
LEBEAU, Noëlle; FR
Agent:
IPAZ; Parc Les Algorithmes Bâtiment Platon CS 70003 Saint-Aubin 91192 GIF-SUR-YVETTE Cedex, FR
Priority Data:
175817705.09.2017FR
Title (EN) ION BEAM GENERATOR WITH NANOWIRES
(FR) GÉNÉRATEUR DE FAISCEAU IONIQUE À NANOFILS
Abstract:
(EN) The present invention relates to an ion beam generator (10), including an emission electrode (12), an extraction electrode (14), and an electricity generator (16). The emission electrode comprises a substrate (20) and a plurality of nanowires (24) extending away from said substrate, substantially towards the extraction electrode, said nanowires having a length of 50 nm to 50 μm. The emission electrode comprises a source of ions comprising a sheet (42) of ionic liquid (40) formed on the substrate and at least partially immersing the nanowires. Said nanowires and the substrate are electrically insulating or semiconducting, the electricity generator (16) being connected to the sheet (42) of ionic liquid. The emission electrode is thus capable of sending ion beams from the ionic liquid to the extraction electrode.
(FR) La présente invention concerne un générateur (10) de faisceau ionique, comportant une électrode d'émission (12), une électrode d'extraction (14), et un générateur électrique (16). L'électrode d'émission comporte un substrat (20) et une pluralité de nanofils (24) s'étendant à partir dudit substrat, sensiblement en direction de l'électrode d'extraction, lesdits nanofils ayant une longueur comprise entre 50 nm et 50 μm. L'électrode d'émission comporte une source d'ions comprenant une nappe (42) de liquide ionique (40) formée sur le substrat et immergeant au moins partiellement les nanofils. Lesdits nanofils et le substrat sont électriquement isolants ou semi-conducteurs, le générateur électrique (16) étant relié à la nappe (42) de liquide ionique. L'électrode d'émission est ainsi apte à envoyer vers l'électrode d'extraction des faisceaux d'ions issus du liquide ionique.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: French (FR)
Filing Language: French (FR)