Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2019048367) DEVICE FOR DEPOSITING A STRUCTURED LAYER ON A SUBSTRATE WITH USE OF A MASK
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/048367 International Application No.: PCT/EP2018/073588
Publication Date: 14.03.2019 International Filing Date: 03.09.2018
IPC:
C23C 14/04 (2006.01) ,C23C 14/12 (2006.01) ,C23C 14/24 (2006.01) ,C23C 14/54 (2006.01) ,C23C 14/56 (2006.01) ,H01L 51/56 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
12
Organic material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
54
Controlling or regulating the coating process
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
56
Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
56
Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
Applicants:
AIXTRON SE [DE/DE]; Dornkaulstraße 2 52134 Herzogenrath, DE
Inventors:
KEIPER, Dietmar; DE
Agent:
GRUNDMANN, Dirk; DE
MÜLLER, Enno; DE
RIEDER, Hans-Joachim; DE
BRÖTZ, Helmut; DE
BOURREE, Hendrik; DE
Priority Data:
10 2017 120 529.206.09.2017DE
Title (DE) VORRICHTUNG ZUM ABSCHEIDEN EINER STRUKTURIERTEN SCHICHT AUF EINEM SUBSTRAT UNTER VERWENDUNG EINER MASKE
(EN) DEVICE FOR DEPOSITING A STRUCTURED LAYER ON A SUBSTRATE WITH USE OF A MASK
(FR) DISPOSITIF POUR DÉPOSER UNE COUCHE STRUCTURÉE SUR UN SUBSTRAT EN UTILISANT UN MASQUE
Abstract:
(DE) Die Erfindung betrifft eine Vorrichtung zum Abscheiden von durch die Verwendung von Masken lateral strukturierten Schichten auf mindestens einem Substrat (20), insbesondere durch Einspeisen eines Dampfs in eine Depositionskammer (19) und Kondensation des Dampfs auf dem Substrat (20), aufweisend einen mittels Kühlmitteln (22) kühlbaren Substrathalter (21) zur Halterung des Substrates (20) und eine an einem Maskenrahmen (10) befestigte Maske (8) zur Auflage auf das Substrat (20). Es werden Maßnahmen angegeben, mit denen in reproduzierbarer Weise exakt strukturierte Schichten auf dem Substrat abgeschieden werden können. Der Maskenrahmen (10) ist von einem mittels Heizmitteln (18) beheizten Heizrahmen (25) umgeben. Zwischen Maskenrahmen (10) und Heizrahmen (25) sind thermische Isoliermittel vorgesehen. Des Weiteren betrifft die Erfindung ein Verfahren zum Abscheiden von Schichten unter Verwendung der gattungsgemäßen Vorrichtung.
(EN) The invention relates to a device for depositing layers that are laterally structured by the use of masks on at least one substrate (20), in particular by feeding a vapour into a deposition chamber (19) and condensing the vapour on the substrate (20), said device having a substrate holder (21), coolable by means of coolants (22), for holding the substrate (20) and a mask (8) secured to a mask frame (10) for positioning on the substrate (20). Measures are described, by means of which precisely structured layers can be deposited reproducibly on the substrate. The mask frame (10) is surrounded by a heating frame (25) heated by means of heating media (18). Thermal insulating means are provided between the mask frame (10) and heating frame (25). The invention further relates to a method for depositing layers with use of a device of the type in question.
(FR) La présente invention concerne un dispositif pour déposer sur au moins un substrat (20) des couches structurées latéralement en utilisant des masques, en particulier en injectant de la vapeur dans une chambre de dépôt (19) et en condensant la vapeur sur le substrat (20), présentant un support de substrat (21) pouvant être refroidi à l'aide de moyens de refroidissement (22) destiné à maintenir le substrat (20) et un masque (8) fixé sur un cadre de masque (10) à poser sur le substrat (20). L'invention concerne des mesures avec lesquelles des couches structurées peuvent être déposées sur le substrat de manière reproductible. Le cadre de masque (10) est entouré par un cadre chauffant (25) chauffé à l'aide de moyens chauffants (18). Des moyens thermiquement isolants sont prévus entre le cadre de masque (10) et le cadre chauffant (25). Cette invention concerne en outre un procédé permettant de déposer des couches en utilisant un dispositif de ce type.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)