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1. (WO2019047244) MECHANICAL ARM, EXPOSURE MACHINE FRONT UNIT AND TEMPERATURE CONTROL METHOD
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Pub. No.: WO/2019/047244 International Application No.: PCT/CN2017/101308
Publication Date: 14.03.2019 International Filing Date: 11.09.2017
IPC:
B25J 19/00 (2006.01) ,G03F 7/20 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
19
Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
深圳市柔宇科技有限公司 SHENZHEN ROYOLE TECHNOLOGIES CO., LTD. [CN/CN]; 中国广东省深圳市 龙岗区横岗街道龙岗大道8288号大运软件小镇43栋 Building #43, Dayun Software Town No. 8288 Longgang Road, Henggang Street Longgang District Shenzhen, Guangdong 518052, CN
Inventors:
黄顺宏 HUANG, Shunhong; CN
朱广飞 ZHU, Guangfei; CN
Agent:
北京清亦华知识产权代理事务所(普通合伙) TSINGYIHUA INTELLECTUAL PROPERTY LLC; 中国北京市 海淀区清华园清华大学照澜院商业楼301室 Room 301 Trade Building Zhaolanyuan, Tsinghua University Qinghuayuan, Haidian District Beijing 100084, CN
Priority Data:
Title (EN) MECHANICAL ARM, EXPOSURE MACHINE FRONT UNIT AND TEMPERATURE CONTROL METHOD
(FR) BRAS MÉCANIQUE, UNITÉ AVANT DE MACHINE D'EXPOSITION ET PROCÉDÉ DE RÉGULATION DE TEMPÉRATURE
(ZH) 机械手臂、曝光机前单元和温度控制方法
Abstract:
(EN) A mechanical arm (10), an exposure machine front unit (1000) and temperature control method. The mechanical arm (10) is used with the exposure machine front unit (1000), the exposure machine front unit (1000) comprising a temperature control unit (200) and a conveying unit (100); the mechanical arm (10) is located within the conveying unit (100), and the mechanical arm (10) comprises: a main body (12) and a temperature sensor (14). The main body (12) may bear a glass substrate and convey the glass substrate that is located within the temperature control unit (200) to the exposure machine; the temperature sensor (14) is arranged on the main body (12) and is used for monitoring the temperature within the conveying unit (100). The mechanical arm (10) may stabilize the temperature of the glass substrate during the conveying process so as to effectively prevent temperature changes from affecting exposure precision.
(FR) L'invention concerne un bras mécanique (10), une unité avant de machine d'exposition (1000) et un procédé de régulation de température. Le bras mécanique (10) est utilisé avec l'unité avant de machine d'exposition (1000), l'unité avant de machine d'exposition (1000) comprenant une unité de régulation de température (200) et une unité de transport (100); le bras mécanique (10) est situé à l'intérieur de l'unité de transport (100), et comprend : un corps principal (12) et un capteur de température (14). Le corps principal (12) peut porter un substrat en verre et transporter celui-ci qui est situé à l'intérieur de l'unité de régulation de température (200) vers la machine d'exposition; le capteur de température (14) est disposé sur le corps principal (12) et est utilisé pour surveiller la température à l'intérieur de l'unité de transport (100). Le bras mécanique (10) peut stabiliser la température du substrat en verre pendant le processus de transport de façon à empêcher efficacement des variations de température d'affecter la précision d'exposition.
(ZH) 一种机械手臂(10)、曝光机前单元(1000)和温度控制方法。机械手臂(10),用于曝光机前单元(1000),曝光机前单元(1000)包括温度控制单元(200)和传送单元(100),机械手臂(10)位于传送单元(100)内,机械手臂(10)包括:本体(12)和温度传感器(14)。本体(12)能够承托玻璃基板并将位于温度控制单元(200)内的玻璃基板传送至曝光机,温度传感器(14)设置于本体(12)上,用于监测传送单元(100)内的温度。该机械手臂(10)可使玻璃基板在传送过程中温度稳定,从而有效避免温度变化对曝光精度产生的影响。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)